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A single row time grating linear displacement sensor

A linear displacement and sensor technology, applied in instruments, measuring devices, electrical devices, etc., can solve the problems of reducing the measurement accuracy of the linear displacement sensor, complex sensor system structure, affecting the quality of the induction signal, etc., achieving simple structure and measurement resolution. High force and the effect of eliminating the influence of high-order harmonics

Active Publication Date: 2019-04-30
CHONGQING UNIV OF TECH
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Problems solved by technology

When the space equivalent of the interpolation clock pulse reaches a certain limit, in order to further improve the resolution, the only way to further increase the number of pole pairs of the sensor is, as a result, the structure of the sensor system is complicated and the manufacturing cost is high.
[0004] At present, the time grating linear displacement sensor that has been developed adopts the form of machined wire groove and winding, which is difficult and costly to increase the number of poles, and the harmonic analysis method is used for the electromagnetic rectangular wave signal, mainly considering the The role of the fundamental wave signal, the high-order harmonics in the electromagnetic rectangular wave signal will affect the quality of the induction signal and reduce the measurement accuracy of the linear displacement sensor

Method used

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  • A single row time grating linear displacement sensor
  • A single row time grating linear displacement sensor
  • A single row time grating linear displacement sensor

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Embodiment Construction

[0019] The present invention will be described in detail below in conjunction with the accompanying drawings.

[0020] Such as Figure 1 to Figure 5 The shown single-row time grating linear displacement sensor includes a fixed scale 1 and a moving scale 2 parallel to the fixed scale 1 with a gap of 0.2 mm.

[0021] The fixed length 1 comprises a fixed length substrate 11, an excitation coil 12 arranged in the wiring layer facing the moving scale on one side of the fixed length substrate 11, and a fixed length insulating layer 13 arranged on the wiring layer. The projection energy of the fixed length substrate 11 is The excitation coil 12 is completely covered, and the fixed-length substrate 11 is a non-magnetic substrate with a thickness equal to 2 mm, which is made of ceramic materials; the excitation coil 12 is wound in a rectangular wave along the measurement direction, and the amplitude of the rectangular wave is L, period is W, and the duty cycle is 0.5.

[0022] The mo...

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Abstract

The invention discloses a single-row time-grating linear displacement sensor. The sensor comprises a fixed ruler and a moving ruler. The fixed ruler comprises a fixed ruler matrix and an exciting coil. The exciting coil is winded as a rectangular wave along a measurement direction. The moving ruler comprises a moving ruler matrix and first and second induction coils. The first and second induction coils are winded as a half-sine winding mode. The first and second induction coils directly face and are parallel to the exciting coil. A sine excitation current flows into the exciting coil. When the moving ruler moves relative to the fixed ruler, the first and second induction coils output two paths of induction signals. Phase shift 90 degree is performed on an induction signal output by the first induction coil and then the induction signal is superposed with an induction signal output by the second induction coil so as to form a travelling wave signal. And then the travelling wave signal carries out phase comparison with a same frequency reference signal. A phase difference is expressed by an interpolated high frequency clock pulse number, and after conversion, a linear displacement is acquired. The structure of the sensor is simple, measurement resolution is high, batch manufacturing is easy to achieve and cost is low.

Description

technical field [0001] The invention belongs to the technical field of precision measurement sensors, and in particular relates to a single row type time grating linear displacement sensor. Background technique [0002] Linear displacement measurement is the most basic geometric quantity measurement, and it exists in a large number in industrial and scientific practices represented by manufacturing. Precision linear displacement measurement mainly uses linear displacement sensors, such as gratings, magnetic gratings, capacitive gratings, etc. These sensors obtain the displacement by counting the grid lines that are evenly divided in space, and their common feature is the use of high-density, ultra-precision space The grid lines are used to meet the resolution requirements of small displacements. In order to further improve the measurement resolution and measurement accuracy of the sensor, in addition to relying on advanced scribing technology to increase the scribing densit...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B7/02
CPCG01B7/02
Inventor 杨继森陈锡侯高义张静李明张天恒
Owner CHONGQING UNIV OF TECH
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