Single-drive pure rotation micro-positioning platform

Abstract

The invention discloses a single-driving type pure rotating and micro-positioning platform. The single-driving type pure rotating and micro-positioning platform comprises an active driving mechanism and a passive compliance mechanism, wherein the active driving mechanism comprises a base I, and a guide mechanism which is driven through piezoelectric ceramics; each of two ends of the guide mechanism is connected with a vertical reversing amplifying mechanism; the vertical reversing amplifying mechanisms are connected to lever amplifying mechanisms I through flexible connecting blocks, and moving connecting blocks I are arranged at output ends of the lever amplifying mechanisms I; the passive compliance mechanism comprises a base II which is connected to be above the base I; a moving platform is arranged in the base II and is connected to the base II through an upper reinforcing plate spring and a lower reinforcing plate spring; each of the upper end and the lower end of the moving platform is provided with an input end which is connected with an output end of a movement transmission flexible rod; the input end; the input end of the movement transmission flexible rod is connected with the output end of one lever amplifying mechanism II; the input end of each lever amplifying mechanism II is provided with a moving connecting block II which is connected to the corresponding moving connecting block I. The single-driving type pure rotating and micro-positioning platform is simple and convenient to control, and high in rotating accuracy.

Description

technical field [0001] The invention relates to a single-drive pure rotation micro-positioning platform, which can realize a large rotation angle and has high rotation precision. Background technique [0002] With the development of micro-nano technology, multi-degree-of-freedom micro-positioning platforms driven by piezoelectric ceramics have been widely used in the micro-nano field. In order to meet the increasingly complex motion requirements, these micro-positioning platforms usually include two motion modes: translation and rotation, but the rotation generally needs to be driven by more than two piezoelectric ceramics at the same time, which poses a challenge to the installation and control of piezoelectric ceramics. up the challenge. Different installation preloads will lead to different output characteristics of piezoelectric ceramics, which is not conducive to the precision control of the rotation direction, and the simultaneous driving of multiple piezoelectric cer...

AI Technical Summary

Problems solved by technology

In order to meet the increasingly complex motion requirements, these micro-positioning platforms usually include two motion modes: translation and rotation, but the rotation generally needs to be driven by more than two piezoelectric ceramics at the same time, which poses a challenge to the installation and control of piezoelectric ceramics. took the challenge

Different installation preloads will lead to different output characteristics of piezoelectric ceramics, which is not conducive to the precision control of the rotation direction, and the simultaneous driving of multiple piezoelectric ceramics will also increase the complexity of motion control

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