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Displacement resolution refinement micro-nano operation platform based on lever drive

A technology of lever transmission and operation platform, which is applied in the direction of transmission device, machine platform/support, instrument, etc., can solve the problem of inability to realize resolution refinement, and achieve the effect of zero adjustment

Active Publication Date: 2019-08-20
SHANDONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In view of the problem that the mechanism disclosed in the existing literature cannot realize the fine resolution, the present invention provides a design method for the micro-nano operation platform based on the lever transmission, which has a simple structure and can realize the fine output resolution with the help of structural improvement design Function

Method used

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  • Displacement resolution refinement micro-nano operation platform based on lever drive
  • Displacement resolution refinement micro-nano operation platform based on lever drive
  • Displacement resolution refinement micro-nano operation platform based on lever drive

Examples

Experimental program
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Effect test

Embodiment 1

[0033] Such as figure 1 , 2As shown, the design method of the micro-nano operating platform based on the displacement resolution refinement of the lever transmission, the structure includes: the base body 1, the lever mechanism 2, the platform moving part 8, the platform guiding mechanism 9, the displacement measuring mechanism 10, and the piezoelectric ceramic actuator 16. Piezoelectric ceramic fastening nuts 17, pre-tightening nuts 18, and pre-tightening springs 19; the base body 1 is an aluminum alloy square block structure, and the upper position inside the base body 1 is provided with a lever mechanism 2 processed by wire cutting, and the lever mechanism 2 is formed by The lever 3, the first briquetting block 4, the second briquetting block 5, the support hinge 6, and the connecting rod 7 are composed. The lever 3 is designed as an equal-strength beam. 3 A first pressure block 4 is provided on the side where the thickness of one end changes near the edge of the base body...

Embodiment 2

[0035] Such as image 3 As shown, the design method of piezoelectric ceramic driven micro-nano operating platform is refined based on the output displacement resolution of lever transmission. The structure includes: substrate 1, lever mechanism 2, platform moving part 8, platform guiding mechanism 9, displacement measuring mechanism 10, Piezoelectric ceramic actuator 16, piezoelectric ceramic fastening nut 17, pre-tightening nut 18, pre-tightening spring 19; the base body 1 is an aluminum alloy square block structure, and the upper position inside the base body 1 is provided with a lever mechanism 2 processed by wire cutting, The lever mechanism 2 is composed of a lever 3, a first briquetting block 4, a second briquetting block 5, a support hinge 6, and a connecting rod 7. The lever 3 is designed as an equal-strength beam, and the side of the lever 3 away from the moving part 8 of the platform is On the side where the thickness changes, the lever 3 is provided with a first pre...

Embodiment 3

[0037] Such as Figure 4 As shown, the design method of the voice coil motor-driven micro-nano operating platform is refined based on the output displacement resolution of the lever transmission. , the second fastening bolt 23, the connecting mechanism 24, the connecting block 25, the first guiding mechanism 26, the second guiding mechanism 27, the lever mechanism 2, the platform moving part 8, the platform guiding mechanism 9; the base body 1 is an aluminum alloy square block structure , the inner side of the substrate 1 is provided with a wire-cut square cavity for accommodating the stator 20 of the voice coil motor, and the bottom of the square cavity is provided with two symmetrically distributed circular through holes for accommodating the first fastening bolts 22, The first fastening bolt 22 cooperates with the threaded hole at the end of the voice coil motor stator 20 through the circular through hole, the voice coil motor mover 21 is located in the voice coil motor sta...

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Abstract

The invention discloses a lever-drive-based displacement resolution refinement micro-nano operating platform. The platform comprises a base body. A lever mechanism is arranged on the base body. The side, close to or far from a platform movement part, of the lever has variation in thickness. The two sides of the end, close to the base body, of the lever are each provided with a pressing block. The central axes of the two pressing blocks are located at the maximum thickness of the lever. The end, close to the platform movement part, of the lever mechanism is connected with the center of the edge of the platform movement part through a connecting rod. A circular hole for containing a preloaded spring is formed in the portion, facing the base body, of the end face of the side, far from the lever, of the pressing block located above the lever. The outer end face of the circular hole is matched with a preload nut. A circular hole for containing a piezoelectric ceramic actuator is formed in the portion, facing the base body, of the end face of the side, far from the lever, of the pressing block located below the lever. The circular hole is matched with a piezoelectric ceramic clamp nut. The platform movement part is connected with the base body through a platform guide mechanism. The center of the side, facing the lever mechanism, of the platform movement part is connected with a displacement measurement mechanism.

Description

technical field [0001] The invention relates to a micro-nano operation method with fine resolution, in particular to a design method for a fine-scale micro-nano operation platform with displacement resolution based on lever transmission, and belongs to the field of micro-nano operation. Background technique [0002] With the development of biological gene technology and nano-detection and manipulation technology in recent years, people have put forward new requirements for micro-nano manipulation technology with nanometer or even sub-nanometer resolution, and also challenged traditional ultra-precision manipulation methods. Especially in the 1990s, A.Midha and L.L.Howell proposed the concept of compliant mechanism, realized the innovation of transmission mechanism, greatly promoted the development of micro-nano operating platform design methods, and opened up a new design concept. The design and development of micro-nano manipulation platforms based on compliant mechanisms h...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): F16H21/10G01B11/02F16M11/04
Inventor 闫鹏鲁帅帅李建明
Owner SHANDONG UNIV
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