Resonance device

A technology of resonators and electrodes, applied in piezoelectric/electrostrictive/magnetostrictive devices, electrical components, impedance networks, etc., can solve problems such as the influence of the lower electrode and the change of the resonant frequency of the resonator, and achieve a stable resonant frequency Effect

Active Publication Date: 2017-12-01
MURATA MFG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In the prior art described in Patent Document 1, when there is another potential near the lower electrode, the potential

Method used

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Experimental program
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no. 1 approach

[0034] Hereinafter, a first embodiment of the present invention will be described with reference to the drawings. figure 1 It is a perspective view schematically showing the appearance of the resonance device 1 according to the first embodiment of the present invention. in addition, figure 2 It is an exploded perspective view schematically showing the structure of the resonance device 1 according to the first embodiment of the present invention. in addition, image 3 yes figure 1 XX' section view.

[0035] This resonance device 1 includes a resonator 10 , and an upper cover 13 and a lower cover 14 that sandwich and seal the resonator 10 and form a vibration space in which the resonator 10 vibrates. The resonator device 1 is constituted by sequentially laminating and bonding the lower cover 14 , the resonator 10 , the bonding portion 127 (an example of a bonding layer), and the upper cover 13 .

[0036] The resonator 10 is a MEMS vibrator manufactured using MEMS technolog...

no. 2 approach

[0101] After the second embodiment, the description of the common cases with the first embodiment will be omitted, and only the differences will be described. In particular, the same functions and effects performed by the same structure are not mentioned in turn in each embodiment.

[0102] Image 6 It is a diagram schematically showing an example of a cross-sectional structure of the resonance device 1 of the present embodiment. Hereinafter, the detailed configuration of the resonator device 1 of the present embodiment will be described focusing on differences from the first embodiment.

[0103] (1. Lower cover 14)

[0104] The structure of the lower cover 14 is the same as that of the first embodiment.

[0105] (2. Resonator 10)

[0106] The structure of the resonator 10 is the same as that of the first embodiment.

[0107] (3. Joint 127)

[0108] The structure of the joint portion 127 is the same as that of the first embodiment.

[0109] (4. Upper cover 13)

[0110]...

no. 3 approach

[0113] Figure 7 It is a figure which briefly shows an example of the cross-sectional structure of the resonator 10 of this embodiment. Hereinafter, points of difference from the first embodiment in the respective configurations of the resonator 10 of the present embodiment will be described.

[0114] (1. Lower cover 14)

[0115] The structure of the lower cover 14 is the same as that of the first embodiment.

[0116] (2. Resonator 10)

[0117] In the present embodiment, a part of the piezoelectric film 128 of the holding portion 11 formed at the bonding position of the holding portion 11 and the bonding portion 127 is removed by processing such as etching. The portion where the piezoelectric film 128 is removed is filled with metal forming the lower wiring W129 such as molybdenum or aluminum. In this embodiment, the position filled with this metal corresponds to the conductive layer C in the first embodiment.

[0118] The structure of other resonators 10 is the same as t...

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Abstract

The purpose of the present invention is to enable resonance frequencies to be stabilized. The present invention is provided with: a resonator provided with a lower electrode, a plurality of upper electrodes, and a piezoelectric film formed between the lower electrode and the plurality of upper electrodes; an upper cover which is provided with a first surface and a second surface, and which is provided such that the first surface faces the upper electrodes of the resonator, and seals a first surface of the resonator; a lower cover which is provided with a first surface and a second surface, and which is provided such that the first surface faces the lower electrode of the resonator, and seals the first surface of the resonator; a power supply terminal which is electrically connected to the upper electrodes; and a ground terminal provided to the second surface of the upper cover. The lower electrode is electrically connected to the ground terminal via the upper cover.

Description

technical field [0001] The present invention relates to resonance devices. Background technique [0002] Conventionally, piezoelectric resonance devices using MEMS (Micro Electro Mechanical Systems: Micro Electro Mechanical Systems) technology have been used as timing devices, for example. This piezoelectric resonance device is mounted on a printed circuit board provided in an electronic device such as a smartphone. [0003] Among resonators used in such a piezoelectric resonance device, a resonator performing harmonic contour vibration has a piezoelectric film formed on a lower electrode, and a plurality of upper electrodes are further formed to cover the piezoelectric film. Patent Document 1 discloses a structure of a resonator in which two upper electrodes are respectively connected to an input terminal and an output terminal, and a lower electrode is floated. [0004] Patent Document 1: Specification of U.S. Patent Application Publication No. 2012 / 0293520 [0005] In ...

Claims

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Application Information

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IPC IPC(8): H03H9/17
CPCH03H9/02275H03H9/0595H03H9/1057H03H9/2452H03H9/13H10N30/871H10N30/875H03H9/17
Inventor 西村俊雄后藤雄一吉井健太郎维莱·卡亚卡里
Owner MURATA MFG CO LTD
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