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Straight-plate practical radio frequency MEMS switch

A straight-type, switch technology, applied in the field of radio frequency MEMS, can solve the problems of lower switch yield, difficult process, complex upper electrode structure, etc., to facilitate characteristic impedance matching, avoid ablation and adhesion, and improve yield Effect

Inactive Publication Date: 2017-12-05
ZHONGBEI UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the upper electrode structure of these two switches is relatively complicated, and the process is difficult to process, which is easy to reduce the yield of the switch

Method used

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  • Straight-plate practical radio frequency MEMS switch
  • Straight-plate practical radio frequency MEMS switch
  • Straight-plate practical radio frequency MEMS switch

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Embodiment Construction

[0039] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.

[0040] In the description of the present invention, it should be understood that the orientations or positional relationships indicated by the terms "center", "upper", "lower", "front", "rear", "left", "right" etc. are based on the attached The orientation or positional relationship shown in the figure is only for the convenience of describing the present invention and simplifying the description, and does not indicate or imply that the referred combination or element must have a specific orientation, be constructed and operated in a spec...

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Abstract

The invention relates to a straight-plate practical radio frequency MEMS switch. The straight-plate practical radio frequency MEMS switch mainly comprises a substrate, a microwave transmission wire, a driving electrode, a lower electrode, a contact, an upper electrode, a fixing anchor point, air bridges and release holes, wherein the microwave transmission wire, the driving electrode and the lower electrode are arranged on the substrate, the driving electrode is arranged below the upper electrode, the upper electrode is a straight-plate structure, the upper electrode is provided with holes to form a release hole array, a fixing end of the upper electrode is fixed on the microwave transmission wire through the fixing anchor point, and the lower electrode is provided with a single contact point. The straight-plate upper electrode is employed, the MEMS switch is simple and practical and is convenient for impedance matching, the MEMS switch is easy to realize processing and is suitable for batch production, the yield of switches is improved, the single-contact structure is further employed, a reliability problem caused by virtual connection of double contacts can be effectively improved, switch contact characteristics are enhanced, weak contact is reduced, switching burning and adhesion can be avoided, and service life of the switch is substantially improved.

Description

technical field [0001] The invention belongs to the technical field of radio frequency MEMS, and in particular relates to a straight plate type practical radio frequency MEMS switch. Background technique [0002] RF MEMS switches have excellent advantages such as small insertion loss, low power consumption, low cost, and high linearity. They can be used in reconfigurable circuits, including attenuators, phase shifters, filters, and antennas, and can also be used in sub- In the system, signal path selection, transmit / receive (T / R) components and beamforming antenna arrays are included. RF MEMS switches can greatly reduce the size, weight and cost of reconfigurable systems, and become an indispensable and important technology in the 21st century. [0003] At present, the domestic research institutes of RF MEMS switches mainly include the 13th Institute of China Power Group, the 55th Institute of China Power Group, Tsinghua University, Peking University, Southeast University, ...

Claims

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Application Information

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IPC IPC(8): H01H59/00
CPCH01H59/0009
Inventor 李孟委刘秋慧张一飞吴倩楠王莉
Owner ZHONGBEI UNIV
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