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204results about How to "Improved contact characteristics" patented technology

Semiconductor device and method of fabricating the same

The present invention relates to a semiconductor device and a manufacturing method thereof. When a contact hole of a semiconductor layer and a source and drain electrode, a through-hole of a positive electrode and the source and drain electrode, a through-hole between connecting metal lines or a contact hole of the through-holes, are formed, at least one type of dry-process corrosion of high corrosion rate and high selectivity is used for dry-process corrosion; wet-process corrosion is adopted in the final corrosion treatment, so as to form the contact holes, the through-holes or the contact holes of the through-holes, which are provided with various conical angles and a plurality of contours; residues that are produced by corrosion can be completely eliminated in the wet-process and dry-process treatment; therefore, the contact holes, the through-holes or the contact holes of the through-holes have excellent contact characteristics. The semiconductor device comprises a substrate, a film transistor that is formed on the substrate and is provided with a semiconductor layer, a grid insulation layer, a grid electrode and a interlayer dielectric, and contact holes that penetrates the grid insulation layer and the interlayer dielectric, is exposed on the surface of the semiconductor layer and is provided with a plurality of contours. The upper part of the contact holes is provided with a contour for the wet-process corrosion; and the lower part has at least one of the contours for the wet-process corrosion and the dry-process corrosion.
Owner:SAMSUNG DISPLAY CO LTD

Method for increasing ohmic contact characteristic of silicon carbide semiconductor

InactiveCN105702712AEffective cleaning and passivationDecrease the density of surface statesSemiconductor devicesRCA cleanTitanium carbide
The invention relates to the field of microelectronic technology, a method for improving the ohmic contact characteristics of a silicon carbide semiconductor, comprising the following steps: (1) performing traditional RCA cleaning on a silicon carbide sample; (2) placing the silicon carbide sample in electron cyclotron resonance microwave plasma In the bulk system, hydrogen plasma treatment is carried out; (3) electrode pattern is formed on the silicon carbide sample by photolithography; (4) metal electrode material titanium or titanium carbide is deposited by magnetron sputtering; (5) The silicon sample was stripped of metal other than the electrodes in an ultrasonic cleaner with acetone, and dried with nitrogen; (6) the silicon carbide sample was annealed in a nitrogen atmosphere. In the present invention, after pre-treating the surface of silicon carbide with hydrogen plasma generated by an electron cyclotron resonance system, the surface of silicon carbide is effectively cleaned and passivated, and the surface state density is significantly reduced, and combined with low work function metal titanium or titanium carbide and relatively The silicon carbide substrate with high doping concentration has a low barrier height of Ti/SiC contact, and good ohmic contact can be formed under low temperature annealing conditions.
Owner:DALIAN UNIV OF TECH

Method for preparing silicon heterojunction solar cell containing composite emission layer

The invention provides a method for preparing a silicon heterojunction solar cell containing a composite emission layer. The method includes the steps that an amorphous silicon back field N is deposited on one face of a substrate C on which a double-faced intrinsic amorphous silicon passivation layer I is deposited, an amorphous silicon layer P2 with the uniform structure is prepared on the face opposite to the amorphous silicon back field N under the conditions that doping concentration, hydrogen dilution and power density are low, a nanocrystalline silicon layer P1 with the uniform structure is prepared under the conditions that the doping concentration, the hydrogen dilution and the power density are improved, and an amorphous silicon / nanocrystalline silicon composite structure formed by the two silicon films serves as the emission layer of the silicon heterojunction solar cell. Materials have the advantages of being high in transmittance and conductivity through the structure, on the basis, the passivation effect of the surface of crystalline silicon can be improved, short wave response and output characteristics of the cell are improved, and the method for preparing the silicon heterojunction solar cell is simple and easy to carry out.
Owner:捷造科技(宁波)有限公司

Plasmon-enhancement-based quantum well infrared detector and preparation method thereof

InactiveCN102185002AIncreases the probability of electronic transitions from the ground stateGood contact characteristics and current spreading abilityFinal product manufactureSemiconductor devicesInfrared detectorMetal grating
The invention discloses a Plasmon-enhancement-based quantum well infrared detector and a preparation method thereof. The detector comprises a Si-GaAs substrate, an AlAs buffering layer, an AlAs:Si lower contact layer positioned on the buffering layer, a multi-quantum well layer, an AlAs:Si upper contact layer positioned on the multi-quantum well layer, a metal film, an upper electrode and an annular lower electrode, wherein the AlAs buffering layer is positioned on the substrate; the multi-quantum well layer is positioned on the AlAs:Si lower contact layer; the metal film and the upper electrode are positioned on the AlAs:Si upper contact layer; the metal film has a grating structure; the upper electrode is embedded in the metal grating structure; and the annular upper electrode is positioned on the lower contact layer and winds around the metal film, the upper contact layer and the multi-quantum well layer. In the detector, through the local area characteristic of Plasmon and the frequency-selecting characteristic of a raster, signals are enhanced and filtered, the absorption efficiency of a quantum well is improved, and the sensitivity of the quantum well infrared detector is increased.
Owner:SUZHOU INST OF NANO TECH & NANO BIONICS CHINESE ACEDEMY OF SCI
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