This invention proposes a nano-transparent
semiconductor electrothermal structure, its fabrication method, and a
semiconductor electrothermal module. The nano-transparent
semiconductor electrothermal structure comprises, from bottom to top, a first insulating layer, a substrate, an electrothermal layer, a second insulating layer, and electrodes. Both the first and second insulating
layers are nanoscale insulating films formed by pulsed
radio frequency synergistic
physical vapor deposition of
hexagonal boron nitride. The first insulating layer is formed on the back side of the substrate, and the second insulating layer is formed above the electrothermal layer. The electrothermal layer is a nanoscale electrothermal conversion film formed by aluminum-doped
zinc oxide,
tin-doped
indium oxide, and
fluorine-doped
tin oxide containing
yttrium trioxide. At least one of
tantalum,
beryllium, and
niobium is embedded in the lattice gaps of the electrothermal layer. The electrothermal layer is used for electrothermal conversion when energized. Electrodes are disposed on both sides of the electrothermal layer, and the electrodes are in contact with the electrothermal layer and connected to a power source. This invention adds a first insulating layer to the back of the substrate, which, together with the second insulating layer above the heating layer, forms a double-sided
hexagonal boron nitride insulating protection structure. This effectively blocks leakage paths on the back of the substrate, improving safety. At the same time, the double-sided high
thermal conductivity insulating
layers balance the
thermal resistance on both sides of the substrate, improving heating uniformity. The two equal-thickness thin films ensure symmetrical stress on both sides of the substrate, preventing warping and deformation. The heating layer uses pulsed
radio frequency synergistic
physical vapor deposition to improve film uniformity. Moreover, the use of
hybrid deposition reduces the
indium content while still achieving a better-performing heating layer.