Plasmon-enhancement-based quantum well infrared detector and preparation method thereof
A technology of infrared detectors and quantum wells, applied in semiconductor devices, final product manufacturing, sustainable manufacturing/processing, etc., can solve problems such as low coupling efficiency, achieve enhanced sensitivity, enhanced and filtering, and reduce the impact of noise signals Effect
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[0029] Example 1
[0030] figure 1 It is a cross-sectional view of the device structure according to Embodiment 1 of the present invention. figure 2 It is a top view of the device structure according to Embodiment 1 of the present invention. As shown in the figure, 1 is an SI-GaAs substrate with a thickness of about 0.5mm; 2 is an AlAs buffer layer with a thickness of about 200nm; 3 is an AlGaAs:Si lower contact layer with a thickness of about 1000nm; 4 is a ring-shaped lower electrode, 5 is a metal film with a thickness of about 120 nm, 6 is an upper electrode, 7 is an AlGaAs:Si upper contact layer with a thickness of about 2000 nm, 8 is a multi-quantum well layer, which is 50 cycles of AlGaAs / GaAs, that is, on the base material An AlGaAs layer of several tens of nanometers and a GaAs layer of several nanometers are grown in turn, and this cycle is repeated for 50 cycles, and 9 is a hole on the metal grating. The metal film 5 has a grating structure, the upper electrode 6...
Example Embodiment
[0041] Embodiment 2
[0042] This embodiment is similar to the first embodiment, except that Ag is selected as the material of the metal thin film, and the array of the metal grating structure is arranged in square. The square arrangement also has its advantages, its arrangement is along the x and y axes, its arrangement is equivalent in both directions, so its calculation is also equivalent.
Example Embodiment
[0043] Embodiment 3
[0044] This embodiment is similar to Embodiment 1, and the difference is only in that the material of the metal thin film is selected from Al.
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