Mems Gyro Sliding Mode Chattering Suppression Method Based on Disturbance Observer
A technology that interferes with observers and gyroscopes. It is applied in the direction of gyroscope effect for speed measurement, gyroscope/steering sensing equipment, instruments, etc., and can solve problems such as poor practicability.
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[0073] Reference figure 1 . The specific steps of the MEMS gyroscope sliding mode chattering suppression method based on the interference observer of the present invention are as follows:
[0074] (a) The dynamic model of the MEMS gyroscope considering the orthogonal error is:
[0075]
[0076] Among them, m is the quality of the test mass; Ω z Enter the angular velocity for the gyro; Is the electrostatic driving force; x * They are the acceleration, velocity and displacement of the MEMS gyroscope detection mass along the drive shaft; y * They are the acceleration, velocity and displacement of the test mass along the test axis; d xx , D yy Is the damping coefficient; k xx , K yy Is the stiffness coefficient; d xy Is the damping coupling coefficient, k xy Is the stiffness coupling coefficient.
[0077] In order to improve the accuracy of mechanism analysis, the MEMS gyroscope dynamic model is processed without dimension. Take dimensionless time Then divide both sides of equati...
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