Bias application for capacitive micromachined ultrasonic transducers
A technology of capacitive micromachines and ultrasonic transducers, which can be used in directions such as fluids that utilize vibrations, and can solve problems such as damaging bias source circuits
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[0025] Some embodiments include techniques and arrangements for applying a bias voltage to a CMUT. Examples of CMUTs to which a bias voltage may be applied include: a CMUT element or subelement in a CMUT array, one or more CMUT cells in a CMUT system, and / or any other type of CMUT configuration. Herein the CMUT may comprise a first electrode opposite to a second electrode, wherein there is a transducing gap between the two electrodes. At least one of the electrodes is movable towards and away from the other for generating and / or receiving ultrasound energy. Transmit and / or receive (TX / RX) circuitry may be directly or indirectly electrically connected to one of the electrodes, and a bias voltage source may be directly or indirectly electrically connected to the other electrode (i.e., via or without any other electronic components).
[0026] In embodiments herein, one or more protective components may be included in the circuit between at least one of the electrodes and at lea...
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