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Method for producing a multi-layer actuator designed as a stack

A technology of actuators and structures, applied in the manufacture/assembly of piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, piezoelectric/electrostrictive devices, etc.

Active Publication Date: 2018-04-17
VTESCO TECH GMBH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, after sintering, the multilayer rods can change their outer dimensions in an unforeseen manner, which can cause problems for operating elements in fuel injectors where the highest precision is important

Method used

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  • Method for producing a multi-layer actuator designed as a stack
  • Method for producing a multi-layer actuator designed as a stack
  • Method for producing a multi-layer actuator designed as a stack

Examples

Experimental program
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Embodiment Construction

[0030] figure 1 A multilayer actuator known from the prior art is shown, the structure of which basically corresponds to the electronics described in DE 10 2006 003 070 B3 already described at the outset. The multilayer actuator in the form of a stack 1 comprises a plurality of material layers 2 stacked one above the other. Material layer 2 consists of piezoelectric ceramics. Electrode layers 3 or 4 are arranged alternately between the two material layers 2 . The stack 1 formed from the material layer 2 and the electrode layers 3 , 4 is configured such that the electrode layers 3 , 4 are guided as far as the material layer 2 and thus onto the corresponding edge of the stack 1 .

[0031] The stack 1 is provided with a corresponding insulating layer IS1 or IS2 on the two circumferential regions 1 a and 1 b which are not geometrically joined together. Layers of polyimide, glass, ceramic or temperature-stable plastics can be applied as insulating layers IS1 , IS2 . Here, tempe...

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PUM

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Abstract

The invention relates to a method for producing a multi-layer actuator designed as a stack (1), which is formed from a plurality of material layers (2), which react to the application of an electricalfield, and from a plurality of electrode layers (3, 4). Each material layer (2) is arranged between two of the electrode layers (3, 4). The applying of a respective isolation layer (IS1, IS2) to one(1a, 1b) of two geometrically discontinuous circumference regions (1a, 1b), the producing of first and second contact holes (KL1, KL2) through one first and one second isolation layer (IS1, IS2) of the isolation layers (IS1, IS2) to every second (3) of the electrode layers (3, 4), and the substantially whole-area covering of the respective isolation layers (IS1, IS2) by an electrically conductivematerial (EL1, EL2), in which the contact holes (KL1, KL2) are filled with the electrically conductive material (EL), occurs on a sintered multi-layer bar (10) which consists of an alternating arrangement of the plurality of material layers (2) and the plurality of electrode layers (3, 4) in a stacking direction (hs) of the multi-layer bar(10). The multi-layer bar (10) is then divided, parallel tothe depth (ts) and stacking direction (hs) thereof, into the plurality of multi-layer actuators.

Description

technical field [0001] The invention relates to a method for making electrical contact with a multilayer actuator having a plurality of material layers responsive to the application of an electric field and a plurality of electrode layers, wherein each material layer is respectively Arranged between two electrode layers adjacent to each other. Such multilayer actuators, which are composed of layers of material layers and electrode layers stacked one above the other and alternately, are electronic components and are often referred to as stacks. The most well-known electronic components of this type today are the stacks commonly referred to as piezoelectric actuators, which are used as actuating elements in fuel injection valves of various engine types in motor vehicles. In this piezoelectric actuator, the material layer is a ceramic layer. Background technique [0002] Typically, such stacks have a rectangular or square cross-section, viewed in top view. The cross section ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/293H10N30/05H10N30/06H10N30/063H10N30/067H10N30/20H10N30/50H10N30/853H10N30/87
CPCH10N30/063H10N30/87H10N30/20H10N30/50H10N30/05
Inventor W.许尔茨
Owner VTESCO TECH GMBH