Zero-bias self-calibration MEMS gyroscope, and zero-bias self-calibration method thereof
A gyroscope, self-calibration technology, applied in gyroscope/steering sensing equipment, gyro effect for speed measurement, instruments, etc., can solve the problem of gyroscope bias-temperature model prone to change, rapidity, stability, and hysteresis Affect the performance of the gyroscope, the inconsistency of the zero bias, etc.
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[0042] The specific implementation manners of the MEMS gyroscope zero-bias self-calibration method based on drive / detection mode reversal of the present invention will be described with reference to the accompanying drawings and specific embodiments.
[0043] figure 1 It is a structural diagram of the resonant ring of the MEMS gyroscope in the present invention. The resonance ring 25 is fixed by an eight-part support beam 26 arranged in the circumferential direction. There are 8 electrodes evenly distributed on the outside of the resonance ring 25, which are electrode 1 to electrode 8 clockwise. Electrode 1 and electrode 5 are the driving electrodes of the driving mode, electrode 3 and electrode 7 are the detection electrodes of the driving mode, and electrodes 2 and Electrode 6 is the driving electrode of the detection mode, and electrode 4 and electrode 8 are the detection electrodes of the detection mode. When the gyroscope works in the two modes in reverse, the function of th...
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