Unlock instant, AI-driven research and patent intelligence for your innovation.

Method and apparatus for measuring electrostatic charge of a substrate

A static charge and voltage measurement technology, applied in the direction of measuring electricity, measuring electrical variables, measuring devices, etc., can solve the problems of not providing ESC, not providing, etc.

Inactive Publication Date: 2020-08-07
CORNING INC
View PDF14 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Also, the rolling ball test provides no information on ESC generation due to vacuum lift and / or frictional contact
Finally, the rolling ball test does not provide a method for mapping and evaluating all or a portion of the surface of a substrate in terms of ESC accumulation

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Method and apparatus for measuring electrostatic charge of a substrate
  • Method and apparatus for measuring electrostatic charge of a substrate
  • Method and apparatus for measuring electrostatic charge of a substrate

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0019] equipment

[0020] Disclosed herein is an apparatus for measuring electrostatic charge, the apparatus comprising: a substrate mounting platform; a substrate contacting member including at least one roller member; and at least one voltage sensor; wherein the apparatus is programmed to (a) rotating the roller member at a rotational speed, (b) contacting the substrate with the rotating said at least one roller member to generate an electrostatic charge; and (c) bringing the substrate and the rotating said at least one roller member in a first direction relatively translating at a translational velocity; and wherein the rotational velocity is controlled independently of the translational velocity.

[0021] Also disclosed herein is an apparatus for measuring electrostatic charge, the apparatus comprising: a substrate mounting platform; an interchangeable contact assembly detachably mounted to a multi-axis actuation assembly; and at least one voltage sensor; wherein the The ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

PropertyMeasurementUnit
diameteraaaaaaaaaa
Login to View More

Abstract

Disclosed herein are apparatuses and methods for measuring electrostatic charge on a surface of a substrate. The apparatuses comprise a substrate mounting platform, a substrate contacting component, and at least one voltage sensor, wherein the apparatus is programmed to independently control the rotational and translation velocity of a roller and / or to measure a voltage of the substrate at multiple points to produce a two-dimensional map of voltage for at least a portion of the substrate.

Description

[0001] Cross References to Related Applications [0002] This application claims the benefit of priority under 35 U.S.C. §119 to U.S. Provisional Application Serial No. 62 / 262,638, filed December 3, 2015, on the content of which this application is based and incorporated by reference in its entirety This article. technical field [0003] The present disclosure generally relates to apparatus and methods for measuring electrostatic charges on substrate surfaces, and more particularly, to apparatus for generating and measuring electrostatic charges on glass substrates under various operating conditions. Background technique [0004] After the substrate is produced, it is typically subjected to downstream processing and handling steps that may generate electrostatic charges ("ESC"). For example, glass substrates may be subjected to various conveying and / or positioning processes during which contact of the substrate with one or more components may result in a surface of the subs...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Patents(China)
IPC IPC(8): G01R29/24G01R15/16
CPCG01R29/24G01R31/2831G01R15/165
Inventor G·P·阿格尼洛P·诺尔斯C·R·尤斯坦尼克
Owner CORNING INC