Method and apparatus for measuring electrostatic charge of a substrate
A static charge and voltage measurement technology, applied in the direction of measuring electricity, measuring electrical variables, measuring devices, etc., can solve the problems of not providing ESC, not providing, etc.
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[0019] equipment
[0020] Disclosed herein is an apparatus for measuring electrostatic charge, the apparatus comprising: a substrate mounting platform; a substrate contacting member including at least one roller member; and at least one voltage sensor; wherein the apparatus is programmed to (a) rotating the roller member at a rotational speed, (b) contacting the substrate with the rotating said at least one roller member to generate an electrostatic charge; and (c) bringing the substrate and the rotating said at least one roller member in a first direction relatively translating at a translational velocity; and wherein the rotational velocity is controlled independently of the translational velocity.
[0021] Also disclosed herein is an apparatus for measuring electrostatic charge, the apparatus comprising: a substrate mounting platform; an interchangeable contact assembly detachably mounted to a multi-axis actuation assembly; and at least one voltage sensor; wherein the The ...
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