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Laser marking detection system and control method thereof

A laser marking and marking technology, applied in laser welding equipment, optical testing flaws/defects, manufacturing tools, etc., can solve problems such as cumbersome processes

Active Publication Date: 2019-08-20
INTEL PROD CHENGDU CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Although it is also possible to use a microscope to check the quality of the mark generation in detail, the process is still cumbersome and still cannot be separated from the naked eye

Method used

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  • Laser marking detection system and control method thereof
  • Laser marking detection system and control method thereof
  • Laser marking detection system and control method thereof

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Embodiment Construction

[0019] Preferred embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although preferred embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art.

[0020] In the following disclosure, the etching of a laser mark on the surface of a semiconductor product, such as an ID composed of a set of numbers, is taken as an example for illustration. The marks etched by the laser etching device are composed of laser dots formed by irradiating laser spots on the surface of the product. In addition to representing the two-dimensional pattern characteristics of the etched marks, these dots also have de...

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Abstract

The invention provides a laser mark quality detection and control method and system. The laser mark is formed on the surface by utilizing a laser etching device according to a laser working parameter.The laser mark quality detection method comprises the steps that at least a part of numerical characteristics of the mark are read, and a surface forming parameter which represents the forming quality of at least a part of the mark according to the numerical characteristic; and whether the surface forming parameter meets a threshold value or not is judged so as to verify the mark quality, whereinwhen the surface forming parameter does not meet the threshold value, the mark is verified to be unqualified. According to the laser mark quality detection and control method and system, the readability quality of the laser mark can be quantified, the machine implementation is facilitated, moreover, the detection can be repeated in a large scale, misjudgment on the laser mark quality due to the influence of ambient light can be avoided, and thus more accurate detection can be realized.

Description

technical field [0001] The invention relates to laser marking detection and control technology. Background technique [0002] Laser etching technology is currently widely used. For example, in the semiconductor industry, lasers are often used to etch the surface of products to generate human or machine-readable marks on the surface, such as product ID numbers, type numbers, barcodes or two-dimensional codes, etc. These numbers or codes are very important to the product, so it is necessary to ensure that these marks are permanently legible and legible. However, there are many factors that affect the readability of these laser marks, such as laser power, the material on which the mark is placed or the characteristics of the product. If the laser marking pattern is applied too lightly, there is a chance that the markings will fade over time. [0003] Currently, the naked eye is usually used to inspect the quality and readability of laser-etched marks, but obviously the inspe...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23K26/362B23K26/70G01N21/88
Inventor 骆毅曹明
Owner INTEL PROD CHENGDU CO LTD