A reflective multi-band comb-shaped narrow-band filter with multi-layer porous microstructure

A narrow-band filter and microstructure technology, applied in the optical field, can solve the problems of film aging and peeling, and achieve the effect of overcoming aging and peeling, increasing the peak wavelength reflectivity, and improving the reflection effect.

Active Publication Date: 2020-05-19
CHANGCHUN UNIV OF SCI & TECH
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Problems solved by technology

[0010] The present invention proposes a reflective multi-band comb-shaped narrow-band filter with a multi-layer porous microstructure in order to overcome the problems of aging and shedding of the optical filter film layer and absorbing light energy in the prior art, and realize multi-band reflection.

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  • A reflective multi-band comb-shaped narrow-band filter with multi-layer porous microstructure
  • A reflective multi-band comb-shaped narrow-band filter with multi-layer porous microstructure
  • A reflective multi-band comb-shaped narrow-band filter with multi-layer porous microstructure

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Embodiment Construction

[0023] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0024] Such as figure 1 As shown, a reflective multi-band comb-shaped narrow-band filter with a multilayer porous microstructure is characterized in that the filter has a multilayer porous microstructure, which includes: an optical material substrate; S, S≥ 1 layer of porous microstructure, which is densely packed layer by layer and directly connected to the optical material substrate. Micropores are evenly arranged on the surface. Points and lines form a hexagon; the multi-layer porous microstructure follows the same parameters and arrangement, the hyperhemispheric radius R of the micropores varies from 0.05-0.1μm, the depth h varies from 0.06-1.8μm, and the hole center spacing The variation range of d is 0.2-0.55 μm. Each layer of porous microstructure is a basic cycle, and the multi-layer porous microstructure is equivalent to multiple cycles of a basic ...

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Abstract

The invention relates to a reflective multi-band comb narrow-band filter with a multi-layer porous microstructure, which belongs to the field of optical technologies, aims to overcome problems of filmaging and shedding and light energy absorption of filters in the prior art, and is formed by directly etching a multi-layer porous microstructure on the surface of a glass element or an optical element. The reflective multi-band comb narrow-band filter structurally comprises an optical material substrate, a multi-layer porous microstructure and micropores, wherein the multi-layer porous microstructure is directly connected with the optical material substrate, layers of the structure are tightly stacked, each layer of the porous microstructure is identical in structure, and the surface is provided with uniformly distributed micropore structures; and the micropores are pot-shaped, the cross section is super-hemispherical, and the center points of the adjacent micropores are sequentially connected to form a hexagon. The reflective multi-band comb narrow-band filter can overcome the problem of film aging and shedding; the multi-layer porous microstructure is made of the same material as the optical element, so that the film can be avoided from absorbing the light energy; and the multi-layer porous microstructure can be equivalent to a dielectric layer with a continuously varying refractive index between the air and the substrate, and has more excellent refraction performance compared with the traditional film materials.

Description

technical field [0001] The invention relates to a narrow-band optical filter, in particular to a multi-band narrow-band high-reflection multi-layer porous microstructure optical filter, which belongs to the field of optical technology. Background technique [0002] Interference filter is a multi-layer film system made by using the principle of multi-beam interference to filter out a small band from a wide spectrum, while allowing the rest of the short-wave and long-wave cut-off or reflection optical device. There are two commonly used interference filters, one is called all-dielectric interference filter: two sets of quarter-wavelength films are coated on flat glass, and the two sets of films can be regarded as two sets of high reflection films. There is a spacer layer in the middle; the other is a metal reflective film interference filter: a layer of high-reflectivity silver film is coated on the substrate, a dielectric film is coated on the silver film, and a layer of high...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B5/26
CPCG02B5/26
Inventor 付跃刚王加科刘美琦罗宇
Owner CHANGCHUN UNIV OF SCI & TECH
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