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Method for uniformity analysis of superconducting nanowire based on elemental imaging

A technology of superconducting nanowires and uniformity, which is applied in the fields of analyzing materials, material analysis using wave/particle radiation, measuring devices, etc., which can solve problems such as difficulty in screening in the early stage

Active Publication Date: 2018-09-14
NANJING UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This brings a lot of difficulties to the early screening of device fabrication

Method used

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  • Method for uniformity analysis of superconducting nanowire based on elemental imaging
  • Method for uniformity analysis of superconducting nanowire based on elemental imaging
  • Method for uniformity analysis of superconducting nanowire based on elemental imaging

Examples

Experimental program
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Embodiment

[0023] Embodiment: this embodiment comprises the following steps:

[0024] (1) Superconducting nanowire sample preparation

[0025] Select a 6nm thick NbN film prepared under normal temperature and heating conditions, use the same conditions for electron beam etching (EBL), and use Ar / SF6 gas for reactive ion etching (RIE) to obtain the same shape and line width of 200nm , 400nm, 600nm nanowire meander structure, the sample size is 12*18μm2, figure 1 Scanning electron microscope images of nanowires of different linewidths are given.

[0026] (2) AES element imaging

[0027] Scanning elemental imaging of the nanowire region was performed using Auger Electron Spectroscopy (AES).

[0028] Raw data were obtained using Auger electron spectroscopy because it is a surface-sensitive analytical technique that utilizes a beam of high-energy electrons as an excitation source. The kinetic energy of Auger electrons reflects the characteristic information of the currently detected eleme...

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Abstract

The invention discloses a method for uniformity analysis of a superconducting nanowire based on elemental imaging, and the method comprise the following steps: preparing a nanowire sample requiring the uniformity analysis; performing AES elemental imaging elements on selected elements in a selected regions; introducing element distribution intensity information into MATLAB; analyzing horizontallythe obtained information, and calibrating width parameters of a nanowire transition zone; longitudinally analyzing the obtained information, and calibrating edge roughness parameters of the nanowire.The method proposes the parameters for calibrating the uniformity of the nanowire, and gives a detailed analysis method by an example. Obtained uniformity analysis results are consistent with preparation conditions of the actual superconducting nanowire, and provide an intuitive standard for discriminating the quality of the superconducting nanowire.

Description

technical field [0001] The invention relates to a method for analyzing the uniformity of superconducting nanowires, in particular to a method for analyzing the uniformity of superconducting nanowires by means of MATLAB software based on AES element imaging. Background technique [0002] Superconducting nanowire single photon detector (SNSPD) has the characteristics of high efficiency, low dark count, fast detection speed and wide response spectrum. It is currently the single photon detector with the best comprehensive performance. There are many applications in laser ranging and bioluminescent detection. These applications also require SNSPD to further improve its performance, requiring devices with higher efficiency, larger detection area, larger array size and photon number resolution function. Compared with small-sized ordinary devices, large-array and large-size SNSPD devices are more difficult to manufacture, and the consistency and yield are further reduced, which res...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/2276
CPCG01N23/2276
Inventor 贾小氢周晓颖涂学凑张蜡宝康琳吴培亨
Owner NANJING UNIV
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