An anti-collision system for a high-speed moving manipulator

Abstract

The invention provides an anti-collision system of a high-speed motion mechanical arm. The anti-collision system comprises a high-speed vision capturing hardware system, a rapid identifying, trackingand positioning system, an initialization reference list module, a wafer reference list comparison module, a mechanical arm mark detection module and a pre-warning module; a work beat video in the normal working process is acquired, and a relation table of the position, the speed and the accelerated speed of the wafer carrying mechanical arm and the time; the circle center position coordinate, thespeed and the accelerated speed information of the wafer are acquired through the vision capturing hardware system and the identifying, tracking and positioning system to be compared with the data stored in the initialization reference list module; marks are made at the fixed positions on the two sides of the edge of the wafer, and the relative position relation between the wafer and the mechanical arm holding structure is determined by acquiring whether the information of the marking points on the mechanical arm exist or not; and the differential value of the motion state is calculated according to the calculated wafer position motion state and the built reference table, and the collision pre-warning device is started once the differential value surpasses the set threshold value. The anti-collision system achieves collision vision detection of high-speed motion objects in a low-cost and high-precision mode, and has the universality.

Description

technical field [0001] The invention belongs to the field of industrial robots, and relates to an anti-collision system of a high-speed moving manipulator, which is applied to the anti-collision system of a wafer handling manipulator in a vacuum clean environment. Background technique [0002] The development of semiconductor technology determines the prosperity of the electronics industry. Wafers are silicon wafers required for the production of semiconductor integrated circuits. Wafers play a supporting role in the semiconductor industry and have received more and more attention in industrial production. Because the wafer is easily deformed, easily damaged, and easily affected by dust particles, a manipulator is required to transport the wafer, and it needs to be transported and transferred in a clean vacuum chamber. [0003] The safety and reliability of the manipulator for handling wafers affects the quality and efficiency of the entire production line. During the handl...

AI Technical Summary

Problems solved by technology

[0006] Aiming at the problem that the current anti-collision method for manipulators cannot achieve both accuracy and real-time performance before the collision, the present invention provides an anti-collision system for high-speed moving manipulators

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