Monolithic double metal plate packaging structure and packaging method thereof

Abstract

The invention discloses a single bimetal plate package structure and a packaging method. The single bimetal plate package structure comprises: a first circuit layer; a second circuit layer electrically connected on the first circuit layer and forming at least one cavity with the first circuit layer; a first solder mask layer disposed under the first circuit layer, wherein the first solder mask layer is provided with a plurality of windowing regions; injection molding holes disposed at a periphery of the single bimetal package structure and communicated with the interior of the cavity; chips located in the cavity; solder balls implanted in the windowing regions of the first solder mask layer for communicating the first circuit layer, and an injection molding material for filling the cavityand the injection molding holes. The invention realizes the stacked package by connecting the circuit to the surface or the inside of the injection molding material by using the bimetal plate for packaging, the traditional cavity mold is not required for plastic package, the manufacturing cost is saved, the package structure obtained by the method is greatly improved in terms of yield and stability, and the process is simple.

Description

technical field [0001] The invention belongs to the field of semiconductor manufacturing, and in particular relates to a single bimetal plate packaging structure and a packaging method. Background technique [0002] With the trend of multi-function and miniaturization of electronic products, high-density microelectronic assembly technology has gradually become the mainstream in the new generation of electronic products. In order to cooperate with the development of a new generation of electronic products, especially the development of smart phones, handheld computers, ultrabooks and other products, the packaging of integrated circuits is also developing in the direction of miniaturization, high density, high power, and high speed, and stacked packaging is exactly Developed in response to its high-density needs. [0003] POP package is a typical semiconductor stack package. In the field of logic circuits and memory, it has been the first choice in the industry. It is mainly ...

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Problems solved by technology

[0004] However, in the above-mentioned method, in the existing POP manufacturing process, it is necessary to groove the plastic package and form interconnection solder balls by solder printing, the manufacturing process is complicated, and the cost is relatively high.

[0005] PiP package is also a very typical semiconductor stacked package. It stacks multiple semiconductor chips in a single package to achieve the purpose of miniaturization and high density. However, when several semiconductor chips are stacked, the upper chip often requires It is smaller than the lower chip, otherwise the upper chip will be pressed to the bonding wire on the lower chip, which will affect the signal transmission of the lower chip

In order to solve this problem, the industry has proposed a stacked package in which copper pillars are set on the substrate to realize the support and signal transmission of the upper chip. However, this structure has relatively high requirements for the upper chip and can only be flip chip, and its Copper pillars with a certain height must be electroplated on the substrate first during manufacture, the manufacturing procedure is more complicated and the production cost is higher

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