A method for separating carbon nanotube array from growth substrate
A carbon nanotube array and growth substrate technology, which is applied in the direction of carbon nanotubes, nanocarbon, nanotechnology, etc., can solve problems such as high adhesion, difficult growth substrate separation, affecting the quality of carbon nanotubes and the use effect of applied products , to achieve the effect of large-scale and industrialization and simple methods
Active Publication Date: 2021-01-26
TSINGHUA UNIV +1
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Problems solved by technology
[0004] After the carbon nanotube array is grown on the substrate by chemical vapor deposition, the carbon nanotube array is often attached to the surface of the substrate, and it is not easy to separate from the growth substrate.
Usually, a tool such as a blade or tweezers is used to peel off the carbon nanotube array from the substrate by mechanical force. However, due to the strong adhesion between the carbon nanotube array and the substrate, the carbon nanotube array separated by the above mechanical peeling method Contains more catalyst particles, which affects the quality of carbon nanotubes and the use effect of applied products
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[0010] The method for preparing carbon nanotubes provided by the technical solution will be described in detail below in conjunction with the accompanying drawings and specific examples.
[0011] see figure 1 , the technical solution provides a method for separating a carbon nanotube array from a growth substrate, which specifically includes the following steps:
[0012] Step 1: providing a substrate on which carbon nanotube arrays are grown.
[0013] In this embodiment, the carbon nanotube array is grown by chemical vapor deposition, which specifically includes the following steps:
[0014] First, a substrate with a smooth surface is provided. The substrate provided should be resistant to high temperature, and will not undergo chemical reaction and atomic infiltration with the gas introduced in the subsequent steps. The material of the substrate can be silicon, quartz sheet, etc. Preferably, a protective layer is formed on the surface of the silicon substrate, such as a si...
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Abstract
The invention relates to a method for separating a carbon nanotube array from a growth substrate, which specifically includes the following steps: providing a substrate with a grown carbon nanotube array; heating the substrate, and feeding oxygen or a mixed gas containing oxygen, reacting the carbon nanotube array with oxygen; separating the carbon nanotube array and the substrate.
Description
technical field [0001] The invention relates to a method for separating a carbon nanotube array from a growth substrate. Background technique [0002] Carbon nanotubes are a new type of one-dimensional nanomaterials discovered in the early 1990s. The special structure of carbon nanotubes determines its special properties, such as high tensile strength and high thermal stability; with the change of the helical mode of carbon nanotubes, carbon nanotubes can exhibit metallic or semiconducting properties. Because carbon nanotubes have an ideal one-dimensional structure and excellent properties in the fields of mechanics, electricity, and heat, they have shown broad application prospects in interdisciplinary fields such as materials science, chemistry, and physics. They are widely used in scientific research and industrial applications. has also received increasing attention. [0003] At present, relatively mature methods for preparing carbon nanotubes mainly include arc discha...
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IPC IPC(8): C01B32/16B82Y40/00B82Y30/00
CPCB82Y30/00B82Y40/00C01B32/162C01B32/168B01J21/185B82B3/0004B82B3/0014
Inventor 刘亮蔡琪郑秋秋
Owner TSINGHUA UNIV