Peak force tapping and torsional resonance combination method based on atomic force microscope technology

An atomic force microscope and peak force tapping technology, applied in scanning probe microscopy, scanning probe technology, instruments, etc., can solve the problems of lack, low efficiency, complicated operation, etc., and achieve the effect of small motion coupling
CN110763873AActive Publication Date: 2020-02-07SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN Β· China
Patent Type
Applications(China)
Current Assignee / Owner
SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
Publication Date
2020-02-07

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Abstract

The invention relates to a peak force tapping and twisting resonance combination method based on an atomic force microscope technology. According to the method, a combined mode of a peak force tappingmode and a torsional resonance mode is used for performing imaging and sample physical property measurement and representation, the peak force tapping mode is utilized to control the interaction between a tip and a sample, and the torsional resonance mode is utilized to measure transverse physical properties of the sample while the peak force tapping mode works. Through the method, the defect that the torsional resonance mode has a special requirement on the sample is overcome, and the problem that the vertical interaction force between the tip and the sample is large in the torsional resonance mode is solved.
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Description

technical field

[0001] The patent of the present invention relates to a composite measurement and imaging method of peak force tapping and torsional resonance based on atomic force microscope technology, specifically, using a composite of peak force tapping mode (Peak Force Tapping mode) and torsional resonance mode (Torsional Resonance mode) mode for imaging and sample physical measurement and characterization. Background technique

[0002] Atomic force microscopy (AFM) is an important tool for measuring mechanical properties at the nanoscale. It can measure the physical properties of samples in the direction perpendicular to the sample surface (longitudinal) or horizontal to the sample surface (transverse).

[0003] For the measurement of longitudinal physical properties, the peak force tapping mode (Peak Force Tapping mode) drives the probe to periodically contact the sample surface with a controllable peak force, which can maintain the tip-sample interaction force at the...

Claims

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