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Peak force tapping and torsional resonance combination method based on atomic force microscope technology

An atomic force microscope and peak force tapping technology, applied in scanning probe microscopy, scanning probe technology, instruments, etc., can solve the problems of lack, low efficiency, complicated operation, etc., and achieve the effect of small motion coupling

Active Publication Date: 2020-02-07
SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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Problems solved by technology

But this method is inefficient and complicated to operate, and the tapping mode (Tapping mode) itself also has many disadvantages
[0007] Although the peak force tapping mode (Peak Force Tapping mode) has great advantages in measuring the longitudinal physical properties of the sample, there is still a lack of a measurement method that combines it with the torsional resonance mode (Torsional Resonance mode) to realize the measurement of the sample. Simultaneous measurement of physical properties in longitudinal and transverse directions

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  • Peak force tapping and torsional resonance combination method based on atomic force microscope technology
  • Peak force tapping and torsional resonance combination method based on atomic force microscope technology
  • Peak force tapping and torsional resonance combination method based on atomic force microscope technology

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Embodiment Construction

[0047] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments.

[0048] Composite peak force tapping mode, including the fusion mode of peak force tapping mode and torsional resonance mode, referred to as composite measurement; including probe driving, signal measurement and control methods.

[0049] The compound peak force tapping mode simultaneously drives the probe to move in the vertical direction (perpendicular to the plane of the cantilever) and the horizontal direction (parallel to the plane of the cantilever). The motion drive in the vertical direction is the same as the peak force tapping mode, and its motion drive frequency is less than the probe's first-order resonance frequency. Motion in the horizontal direction is driven by the same torsional resonance mode at the same frequency as the probe's torsional resonance frequency, which is much higher than the drive frequency of the peak force tappin...

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Abstract

The invention relates to a peak force tapping and twisting resonance combination method based on an atomic force microscope technology. According to the method, a combined mode of a peak force tappingmode and a torsional resonance mode is used for performing imaging and sample physical property measurement and representation, the peak force tapping mode is utilized to control the interaction between a tip and a sample, and the torsional resonance mode is utilized to measure transverse physical properties of the sample while the peak force tapping mode works. Through the method, the defect that the torsional resonance mode has a special requirement on the sample is overcome, and the problem that the vertical interaction force between the tip and the sample is large in the torsional resonance mode is solved.

Description

technical field [0001] The patent of the present invention relates to a composite measurement and imaging method of peak force tapping and torsional resonance based on atomic force microscope technology, specifically, using a composite of peak force tapping mode (Peak Force Tapping mode) and torsional resonance mode (Torsional Resonance mode) mode for imaging and sample physical measurement and characterization. Background technique [0002] Atomic force microscopy (AFM) is an important tool for measuring mechanical properties at the nanoscale. It can measure the physical properties of samples in the direction perpendicular to the sample surface (longitudinal) or horizontal to the sample surface (transverse). [0003] For the measurement of longitudinal physical properties, the peak force tapping mode (Peak Force Tapping mode) drives the probe to periodically contact the sample surface with a controllable peak force, which can maintain the tip-sample interaction force at the...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/24
CPCG01Q60/24
Inventor 刘连庆施佳林于鹏苏全民
Owner SHENYANG INST OF AUTOMATION - CHINESE ACAD OF SCI
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