Error Calibration Method of Dynamic Angle Modulation Interferometry System Based on Tip\Tilt Mirror
A technology of angle modulation and interference system, which is applied in the direction of instruments, measuring devices, optical devices, etc., and can solve problems such as dynamic system errors and aberrations
Active Publication Date: 2019-08-13
NANJING UNIV OF SCI & TECH
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[0003] However, as the key device of this method, the dynamic angle modulation of the Tip / Tilt mirror will introduce a dynamic system error, because there are aberrations in the actual optical lens, and the aberrations introduced by the light of different fields of view are also different
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[0025] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0026] combine figure 1 , an error calibration method for a dynamic angle modulation interference system based on Tip\Tilt mirror, the steps are as follows:
[0027] Step 1. Build a dynamic angle modulation interference system based on Tip\Tilt mirror:
[0028] The dynamic angle modulation interference system based on the Tip / Tilt mirror includes a laser light source 1, a beam expander mirror 2, a first beam splitter 3, a reference mirror 4, a Tip / tilt mirror 5, a second beam splitter 6, and a standard lens group 7, Standard sphere 8, imaging lens 9 and imaging system 10.
[0029] A laser light source 1, a beam expander 2, a first beam splitter 3, and a reference mirror 4 are sequentially arranged on the first optical axis, and a Tip / tilt mirror 5, a second beam splitter 6, and a standard lens group 7 are sequentially arranged on the second coaxial axis. A...
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The invention discloses an error calibration method based on a Tip\Tilt mirror dynamic angle modulation interference system. The error calibration method includes the following steps that step one, the Tip\Tilt mirror dynamic angle modulation interference system is built; step two, space position and attitude of a Tip\Tilt mirror are adjusted, and an initial position is set; step three, a relationcurve between former 36 coefficients of Zernike and a deflection angle is drawn; step four, coefficient values of the former 36 coefficients of the Zernike in a tip / tilt mirror under different deflection directions and different deflection angles are obtained; and step five, by using results obtained in the step four, tip / tilt mirror output wavefront information of the system in an arbitrary deflection state is obtained, and thus calibration of system errors is achieved. The error calibration method based on the Tip\Tilt mirror dynamic angle modulation interference system has the advantages of dynamic, high efficiency and high universality.
Description
technical field [0001] The invention belongs to the technical field of high-precision detection of free-form surface components, and in particular relates to an error calibration method of a dynamic angle modulation interference system based on a Tip\Tilt mirror. Background technique [0002] Due to its strong system versatility, non-zero interferometry is widely used in the measurement of complex surfaces. According to the surface gradient distribution of the inspected surface, the multiple inclined wavefront interferometry uses the lens array to generate compensation waves with different angles in the interference optical path to compensate different areas of the inspected component, thereby completing the interferometric measurement. It combines the advantages of Shack-Hartmann wavefront sensing and interferometry, greatly increases the dynamic measurement range of the interferometric system, and is suitable for surface shape measurement with large gradient changes. But ...
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IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 沈华赵正洋朱日宏高金铭李嘉王念孙越王劲松李轩
Owner NANJING UNIV OF SCI & TECH