Error calibration method based on Tip\Tilt mirror dynamic angle modulation interference system
An angle modulation, interference system technology, applied in instruments, measuring devices, optical devices, etc., can solve the problems of different aberrations, dynamic system errors, etc.
Active Publication Date: 2018-12-21
NANJING UNIV OF SCI & TECH
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[0003] However, as the key device of this method, the dynamic angle modulation of the Tip / Tilt mirror will introduce a dynamic system error, because there are aberrations in the actual optical lens, and the aberrations introduced by the light of different fields of view are also different
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[0025] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0026] Combine figure 1 , An error calibration method based on Tip\Tilt mirror of dynamic angle modulation interference system, the steps are as follows:
[0027] Step 1: Build a dynamic angle modulation interference system based on Tip\Tilt mirror:
[0028] The dynamic angle modulation interference system based on Tip\Tilt mirror includes a laser light source 1, a beam expander 2, a first beam splitter 3, a reference mirror 4, a Tip / tilt mirror 5, a second beam splitter 6, and a standard lens group 7, Standard spherical surface 8, imaging lens 9, and imaging system 10.
[0029] The laser light source 1, the beam expander 2, the first beam splitting plate 3, and the reference mirror 4 are sequentially arranged on the common first optical axis, and the Tip / tilt mirror 5, the second beam splitting plate 6, and the standard lens group 7 are sequentially arranged on the ...
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The invention discloses an error calibration method based on a Tip\Tilt mirror dynamic angle modulation interference system. The error calibration method includes the following steps that step one, the Tip\Tilt mirror dynamic angle modulation interference system is built; step two, space position and attitude of a Tip\Tilt mirror are adjusted, and an initial position is set; step three, a relationcurve between former 36 coefficients of Zernike and a deflection angle is drawn; step four, coefficient values of the former 36 coefficients of the Zernike in a tip / tilt mirror under different deflection directions and different deflection angles are obtained; and step five, by using results obtained in the step four, tip / tilt mirror output wavefront information of the system in an arbitrary deflection state is obtained, and thus calibration of system errors is achieved. The error calibration method based on the Tip\Tilt mirror dynamic angle modulation interference system has the advantages of dynamic, high efficiency and high universality.
Description
Technical field [0001] The invention belongs to the technical field of high-precision detection of the surface shape of a free-form surface element, and specifically relates to an error calibration method of a dynamic angle modulation interference system based on a Tip\Tilt mirror. Background technique [0002] Due to its strong system versatility, non-zero interference is widely used in the measurement of complex surface shapes. In the multi-tilted wavefront interferometry, according to the surface gradient distribution of the inspected surface, a lens array is used in the interference optical path to generate different angle compensation waves to compensate for different areas of the inspected element, thereby completing the interferometric measurement. It combines the advantages of Shaker-Hartmann wavefront sensing and interferometric measurement, greatly increasing the dynamic measurement range of the interferometric system, and is suitable for surface measurement with large ...
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IPC IPC(8): G01B11/24
CPCG01B11/2441
Inventor 沈华赵正洋朱日宏高金铭李嘉王念孙越王劲松李轩
Owner NANJING UNIV OF SCI & TECH