A wafer detecting method

Abstract

The invention belongs to the technical field of electronic product processing and production, and discloses a wafer detecting method. The method includes S1, providing a wafer detection device with atleast macroscopic detection station and microscopic detection station, providing a wafer detection device with at least microscopic detection station and a wafer detection device with at least microscopic detection station; S2, carry that wafer to be tested to the macroscopic detection station and / or the microscopic detection station, and carrying out macroscopic detection and / or microscopic detection on the wafer to be tested; S3, removing the detected wafer from the wafer detection apparatus. The wafer detection method of the present invention can perform macroscopic and microscopic detection on a wafer by providing a wafer detection device with a macroscopic detection station and a microscopic detection station, wherein the macroscopic detection station mainly observes defects visibleto the naked eye on the wafer. The microscopic inspection station mainly observes the defects on the wafer which can not be observed by the naked eye through the microscope equipment, so that the defects caused by the processing technology can be detected and analyzed comprehensively so as to improve the wafer in time.

Description

technical field [0001] The invention relates to the technical field of electronic product processing and production, in particular to a wafer detection method. Background technique [0002] Wafer microdisplay devices are different from conventional AMOLED devices that use amorphous silicon, microcrystalline silicon or low-temperature polycrystalline silicon thin film transistors as the backplane. [0003] Wafer microdisplays have a broad market application space, especially suitable for helmet-mounted displays, stereoscopic display mirrors, and eye displays, and can be used for portable computers, wireless Internet browsers, portable DVDs, game platforms, and wearable computers. Mobile information products provide high-quality video display, and even when combined with mobile communication networks and satellite positioning systems, accurate image information can be obtained anywhere and at any time, so that it can be used in national defense, aviation, aerospace and even in...

AI Technical Summary

Problems solved by technology

[0004] At present, the technology of ultra-micro display and near-eye large-screen equipment with wafer as the core is relatively new, and the wafer manufacturing process is still in the stage of exploration and trial. Therefore, there may be some defects in the wafer manufacturing process. The adjustment of the manufacturing process in the wafer requires defect inspection on the wafer. However, the existing market is still lacking in wafer inspection methods

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