A Correction Method for Optical Mirror Processing Inspection Errors Caused by Airflow

An optical mirror surface and error detection technology, which is applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of low processing precision of optical mirror surfaces, and achieve the effects of improving reliability, improving ability, and improving processing accuracy

Active Publication Date: 2021-07-30
SHANDONG ZHONGHENG OPTOELECTRONIC TECH CO LTD
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Problems solved by technology

[0003] The purpose of the present invention is to provide a method for correcting optical mirror processing detection errors caused by airflow, so as to improve the accuracy of optical mirror processing detection error correction, and to overcome the optical mirror processing accuracy caused by the error accumulation that is easy to occur in the existing optical mirror processing process low defect

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  • A Correction Method for Optical Mirror Processing Inspection Errors Caused by Airflow
  • A Correction Method for Optical Mirror Processing Inspection Errors Caused by Airflow

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Embodiment Construction

[0020] The present invention will be further described below with reference to the accompanying drawings.

[0021] figure 1 Shown is a block diagram of the overall structure of an optical mirror processing detection error correction system caused by airflow, and its working process is as follows:

[0022] 1) The original optical mirror processing control system executes the processing process according to the set processing steps. After the processing of each step is completed, the optical mirror processing robot will suspend the processing action within a certain period of time. Physical quantity measurement, using an interferometer to measure the size of the current optical mirror, continuously measuring the readings 6 times, and dividing the measured values ​​into two groups, namely i 11 , i 12 , i 13 , i 21 , i 22 , i 23 , while measuring the size of the optical mirror, use the airflow detection device to measure the airflow value on the surface of the optical mirror...

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Abstract

A method for correcting optical mirror processing detection errors caused by airflow, belonging to the field of optical processing, including measuring the processing size of the optical mirror and the airflow value on the surface of the optical mirror; inputting the measured processing size and airflow value into an error processing system, and passing the error The processing program obtains the error processing result; the error processing result is transmitted to the optical mirror processing control system through the bus, and the mirror processing control system plans and corrects the motion trajectory through the motion control function, and sends the corrected data to the optical mirror processing actuator to realize Control the optical mirror processing actuator to complete the mirror processing correction action. The optical mirror processing detection error correction method of the present invention overcomes the problem of inaccurate optical mirror detection results caused by airflow changes, and improves the reliability of the measurement results; the feedback control with the optical mirror processing actuator can automatically adjust the processing process and improve The precision of optical mirror surface processing is improved.

Description

technical field [0001] The invention relates to an optical mirror processing detection technology, in particular to a method for correcting an optical mirror processing detection error caused by airflow. Background technique [0002] Optical components have important applications in astronomical observation systems, laser nuclear fusion devices, precision optical measuring instruments, and other defense and civilian fields. Today's optical manufacturing capabilities still cannot fully meet the requirements of optical components in product processing accuracy and surface / subsurface quality . The surface quality of optical components is a key factor in determining the performance of the optical system. Poor surface quality will reduce the resolution and its scattering will cause a large energy loss. The performance index of the camera is greatly reduced, and in severe cases, it cannot be imaged at all. The reliability of detection technology is an important factor to ensure ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00
CPCG01B11/00
Inventor 程刚黄玉福徐庭钰顾伟郭锋张来宾
Owner SHANDONG ZHONGHENG OPTOELECTRONIC TECH CO LTD
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