Method for detecting and correcting error in optical mirror machining caused by airflow

Abstract

The invention discloses a method for detecting and correcting the error in optical mirror machining caused by airflow, and belongs to the field of optical machining. The method comprises the steps of:measuring the machining size of the optical mirror and the airflow value of the surface of the optical mirror; inputting the measured machining size and the airflow value into an error processing system, and obtaining an error processing result through an error processing program; transmitting the error processing result to an optical mirror machining control system through a bus; and the opticalmirror machining control system planning and correcting a motion track through a motion control function, and sending corrected data to an optical mirror machining execution mechanism, so as to control the optical mirror machining execution mechanism to complete the mirror machining correction action. According to the method for detecting and correcting the error in the optical mirror machining caused by airflow, the problem that inaccuracy of the optical mirror detection result caused by airflow change is solved; the reliability of the measurement result is improved; in combination with thefeedback control of the optical mirror machining execution mechanism, the machining process can be automatically adjusted; and the machining precision of the optical mirror is improved.

Description

technical field [0001] The invention relates to an optical mirror processing detection technology, in particular to a method for correcting an optical mirror processing detection error caused by airflow. Background technique [0002] Optical components have important applications in astronomical observation systems, laser nuclear fusion devices, precision optical measuring instruments, and other defense and civilian fields. Today's optical manufacturing capabilities still cannot fully meet the requirements of optical components in product processing accuracy and surface / subsurface quality . The surface quality of optical components is a key factor in determining the performance of the optical system. Poor surface quality will reduce the resolution and its scattering will cause a large energy loss. The performance index of the camera is greatly reduced, and in severe cases, it cannot be imaged at all. The reliability of detection technology is an important factor to ensure ...

AI Technical Summary

Problems solved by technology

[0003] The purpose of the present invention is to provide a method for correcting optical mirror processing detection errors caused by airflow, so as to improve the accuracy of optical mirror processing detection error correction, and to overcome the optical mirror processing accuracy caused by the error accumulation that is easy to occur in the existing optical mirror processing process low defect

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