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Characterize the height profile of a sample by side view imaging

A sample, viewing angle technology, applied in the field of scanning probe microscopy, which can solve problems such as collision, trouble, and damage to probe sample analysis

Active Publication Date: 2021-12-07
安东帕有限责任公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, especially when samples have complex shapes, it can still happen that the probe with its highly sensitive tip could inadvertently collide with the sample, which could damage the probe, the sample and / or the analysis
Traditional methods aimed at partially overcoming these shortcomings lack precision and are cumbersome

Method used

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  • Characterize the height profile of a sample by side view imaging
  • Characterize the height profile of a sample by side view imaging
  • Characterize the height profile of a sample by side view imaging

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Embodiment Construction

[0066] The illustrations in the accompanying drawings are schematic. In different figures, similar or identical elements are provided with the same reference signs.

[0067] Before referring to the drawings, some basic considerations upon which the exemplary embodiments of the present invention are developed will be outlined.

[0068] According to an exemplary embodiment of the present invention, a framework for determining the profile of a sample based on a side view camera is provided. In particular, a multi-camera based sample height map determination can be performed, especially for assisting probe control, and more specifically for cantilever engagement.

[0069] In scanning probe microscopy systems it is desirable to have the probe and sample in close proximity prior to the final ligation procedure. This engagement is generally a slow process whose duration scales linearly with the gap that needs to be covered. Therefore, it is desirable to reduce or even minimize thi...

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PUM

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Abstract

A scanning probe microscope (1), in particular an atomic force microscope, for analyzing a sample (6) by moving a probe (11) and the sample (6) relative to each other, wherein the scanning probe microscope (1) comprises: a detection unit (60) comprising a side view camera (90) arranged and configured to detect an image of the sample (6) with a substantially horizontal side view; and a determination unit (80) , the determining unit is configured to determine information indicative of an outline of at least a portion of the surface of the sample (6) based on the detected image.

Description

technical field [0001] The present invention relates to scanning probe (probe, probe) microscopes (SPM), in particular to atomic force microscopes (AFM). The invention also relates to methods of analyzing samples by scanning probe microscopy. Background technique [0002] In SPM or AFM, two bonding steps are usually performed before scanning the sample surface. In a first coarse engagement step, the cantilever probe is moved from a few millimeters (or even centimeters) above the sample surface to a position less than 1 millimeter above (eg several hundred micrometers). After this step, fine bonding begins: the cantilever is moved continuously or in steps of a few micrometers until the cantilever reaches its final measurement start position. [0003] During such bonding steps and during the actual sample analysis where the probe scans the sample, care should be taken that neither the probe nor the sample can be damaged by collisions between the probe and the sample. This p...

Claims

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Application Information

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IPC IPC(8): G01B11/24G01B11/06
CPCG01B11/0608G01B11/24G01Q10/06G01Q30/02G01Q20/02G01Q30/025G01Q30/04G01Q60/38
Inventor 马丁·戈代克-舍恩巴赫尔阿尔贝托·戈麦斯-卡萨多丹尼尔·科勒马库斯·布兰德纳
Owner 安东帕有限责任公司