A silicon micro -gyro Sigma Delta detection closed -loop control system structure and parameter setting method

Abstract

The invention belongs to the technical field of closed-loop control of inertial MEMS sensors, and relates to a structure of a silicon micro-gyroscope Sigma Delta detection closed-loop control system and a parameter setting method. The invention establishes the open-loop loop transfer function of Sigma Delta by determining the zero, pole and open-loop gain of the quantization noise transfer function; and then embeds a lead-lag compensator in the Sigma Delta loop, so that the pole of the compensator is equal to the meter head The zero point of the module realizes the zero-pole cancellation; the pole of the compensator is equal to the real zero point of the open-loop transfer function; other control parameters of the Sigma Delta are determined by the undetermined coefficient method, thus realizing the closed-loop control system of the silicon micro-gyroscope Sigma Delta detection Structural design and parameter setting. By adding a lead-lag compensator in the loop structure, the invention cancels the negative influence of the zero point of the header on the quantization noise shaping of the modulator by means of zero-pole cancellation, and ensures the detection of high signal-to-noise ratio of the angular rate signal. At the same time, the pure digital output of the silicon micro-gyroscope is realized.

Description

technical field [0001] The invention belongs to the micro-inertial sensor technology, and relates to a silicon micro-gyroscope Sigma Delta detection closed-loop control system structure and a parameter setting method. Background technique [0002] The closed-loop control technology of silicon micro-gyroscope detection helps to improve the linearity of the silicon micro-gyroscope's output; it can also narrow the frequency gap between driving and detecting dual modes, thereby improving the mechanical sensitivity of the silicon micro-gyroscope detection mode, and by improving the signal-to-noise than improve the precision level of silicon micro-gyroscope. Among them, the Sigma Delta detection closed-loop control system scheme realizes the electromechanical Sigma Delta modulator by embedding the head module of the silicon microgyro into the Sigma Delta modulator loop, which has the advantages of direct digital quantization output, good dynamic characteristics and high signal-to-...

AI Technical Summary

Problems solved by technology

[0005] When designing the structure design of the silicon microgyro Sigma Delta detection closed-loop control system, if the special control system structure design and control parameter tuning are not carried out according to the characteristics of the silicon microgyro meter module, the Sigma Delta detection closed-loop control system will not be able to achieve the expected quantification The noise transfer function even causes the Sigma Delta system to be unstable, resulting in the failure of the closed-loop control of the silicon micro-gyroscope detection

Images