Silicon micro-gyroscope Sigma Delta detection closed-loop control system structure and parameter setting method thereof

Abstract

The invention relates to a silicon micro-gyroscope Sigma Delta detection closed-loop control system structure and a parameter setting method thereof, belonging to the technical field of inertial MEMSsensor closed-loop control. According to the invention, an open-loop loop transfer function of Sigma Delta is established by determining a zero point, a pole and an open-loop gain of a quantization noise transfer function; then pole-zero cancellation is realized by embedding a lead-lag compensator in the Sigma Delta loop and setting the pole of the compensator to be equal to the zero point of a meter module; the pole of the compensator is set to be equal to the real zero point of the open-loop loop transfer function; and other control parameters of the Sigma Delta are determined by a undetermined coefficient method; therefore, the structural design and parameter setting of the silicon micro-gyroscope Sigma Delta detection closed-loop control system are realized. According to the invention,through adding the lead-lag compensator to the loop structure and the method of pole-zero cancellation, the negative effect of the meter zero point on the modulator quantization noise shaping is offset, the high signal-to-noise detection of an angular rate signal is ensured, and the pure digital output of the silicon micro-gyroscope is realized at the same time.

Description

technical field [0001] The invention belongs to micro-inertial sensor technology, and relates to a silicon micro-gyroscope Sigma Delta detection closed-loop control system structure and a parameter setting method. Background technique [0002] Silicon micro gyroscope detection closed-loop control technology helps to improve the linearity of silicon micro gyroscope output; and can reduce the frequency gap between driving and detection dual modes, so as to improve the mechanical sensitivity of silicon micro gyroscope detection mode, by improving the signal-to-noise Ratio to improve the accuracy level of silicon microgyroscope. Among them, the Sigma Delta detection closed-loop control system scheme implements the electromechanical Sigma Delta modulator by embedding the meter module of the silicon microgyroscope into the Sigma Delta modulator loop, which has the advantages of direct digital quantization output, good dynamic characteristics, and high signal-to-noise ratio. . ...

AI Technical Summary

Problems solved by technology

[0005] When designing the structure design of the silicon microgyro Sigma Delta detection closed-loop control system, if the special control system structure design and control parameter tuning are not carried out according to the characteristics of the silicon microgyro meter module, the Sigma Delta detection closed-loop control system will not be able to achieve the expected quantification The noise transfer function even causes the Sigma Delta system to be unstable, resulting in the failure of the closed-loop control of the silicon micro-gyroscope detection

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