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Measurement coordinate correction method and system

A technology for measuring coordinates and correction methods, applied in the field of measurement coordinate correction methods and systems, which can solve problems such as inaccurate measurement results and inability to confirm the actual coordinates of the target to be measured, so as to improve accuracy and avoid damage

Active Publication Date: 2020-06-16
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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Problems solved by technology

[0004] The invention provides a method and system for correcting measurement coordinates to solve the technical problem of inaccurate measurement results due to the inability to confirm the actual coordinates of the target to be measured during physical measurement

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  • Measurement coordinate correction method and system

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Embodiment Construction

[0042] The following descriptions of the various embodiments refer to the accompanying drawings to illustrate specific embodiments in which the invention may be practiced. The directional terms mentioned in the present invention, such as [top], [bottom], [front], [back], [left], [right], [inside], [outside], [side], etc., are only for reference The orientation of the attached schema. Therefore, the directional terms used are used to illustrate and understand the present invention, but not to limit the present invention. In the figures, structurally similar elements are denoted by the same reference numerals.

[0043] The invention provides a method and system for correcting measurement coordinates to solve the technical problem of inaccurate measurement results due to the inability to confirm the actual coordinates of the target to be measured during physical measurement. Specifically, see figure 1 , the method includes the following steps:

[0044] First, in step S110, th...

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Abstract

A measurement coordinate correction method and system, the method comprising: acquiring a measurement range of a test area and the coordinates of the geometric center of the measurement range (S110); correcting an optical lens according to the acquired coordinates of the geometric center (S120); acquiring, by means of the corrected optical lens, the coordinates of the geometric center of an object to be measured (S130); comparing the coordinates of the object to be measured with the measurement range of a physical measurement module (S140); and when the coordinates of the object to be measured are within the measurement range of the physical measurement module, executing physical measurement (S160).

Description

technical field [0001] The invention relates to the field of image measurement, in particular to a measurement coordinate correction method and system. Background technique [0002] At present, there are mainly two ways to measure the object to be measured, one is to use the probe to directly contact the object to be measured for measurement (called a probe measurement system or "contact measurement system), and the other is to use optical The coupled lens (ChargeCoupled Device, CCD) acquires the image of the object to be measured for measurement (called an image measurement system or a non-contact measurement system). The existing measurement equipment is usually equipped with a probe measurement system and an image measurement system at the same time. system. [0003] Since the probe measurement system is not equipped with an observation lens, when the probe is used for resistivity measurement, the coordinates of the job file are directly used as the measurement coordinat...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/00
CPCG01B11/002
Inventor 方杰
Owner SHENZHEN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD