Chip pressure measurement device

Abstract

The invention relates to a chip pressure measurement device. The device comprises a substrate and a plurality of pressure measurement devices, wherein each pressure measurement device comprises a pressure measurement seat connected with the lower end of the substrate, a containing slot arranged at the upper end of the pressure measurement seat and communicated with two ends of the pressure measurement seat, a guiding through hole arranged on the bottom surface of the containing slot and communicated with the lower end of the pressure measurement seat, a pressure head penetrated in the guidingthrough hole and adapted to the guiding through hole, a lifting block arranged in the containing slot and connected with the upper end of the pressure head, at least one adjustment screw, screw holesarranged at the upper end of the lifting block, same as the adjustment screws in the aspect of number and corresponding to the adjustment screws one by one, hang spring through holes formed in the substrate, same as the adjustment screws in the aspect of number and corresponding to the adjustment screws one by one, and a pressure spring group arranged between the upper end of the lifting block andthe lower end of the substrate; the lower end of the adjustment screws pass through the hang spring through holes to be screwed with the screw holes; and the width of the lifting block is adapted tothe width of the containing slot. The chip pressure measurement device is relatively good in pressure measurement stability, relatively high in pressure measurement efficiency and relatively low in cost.

Description

technical field [0001] The invention relates to the field of integrated circuit testing and sorting, in particular to a chip pressure measuring device. Background technique [0002] Integrated circuit chip pressure measurement is an important part of integrated circuit quality inspection, and the performance of the pressure measurement device directly determines the efficiency and stability of integrated circuit pressure measurement. Traditional chip testing equipment has single or multiple independently set pressure measuring heads, which have the disadvantages of poor pressure measurement stability, low pressure measurement efficiency or high cost; therefore, a design with better pressure measurement stability, A chip pressure measurement device with high pressure measurement efficiency and low cost has become an urgent problem to be solved. Contents of the invention [0003] The purpose of the present invention is to overcome the shortcomings of the current chip detect...

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Problems solved by technology

[0003] The purpose of the present invention is to overcome the shortcomings of the current chip detection equipment with single or multiple independently set pressure measuring heads, which have poor pressure measurement stability, low pressure measurement efficiency or high cost, and provide a pressure measurement A chip pressure measuring device with good stability, high pressure measurement efficiency and low cost

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