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Fixtures for Wafer Cassettes

A fixing device and wafer cassette technology, which is applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of easy damage, unstable wafer fixation, complex structure, etc., to achieve a stable upper end position and ensure stability The effect of the stability and the connection position is firm

Active Publication Date: 2021-08-24
BEIJING SEMICON EQUIP INST THE 45TH RES INST OF CETC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The object of the present invention is to provide a fixing device for a wafer cassette to solve the problem in the prior art that the structure of the mounting fixture for the wafer cassette is complicated, and when the wafer is soaked and cleaned, the wafer is not firmly fixed and easily damaged technical issues

Method used

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  • Fixtures for Wafer Cassettes
  • Fixtures for Wafer Cassettes
  • Fixtures for Wafer Cassettes

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Embodiment Construction

[0036] The technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0037] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, ...

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Abstract

The invention provides a fixing device for a wafer box, and relates to the technical field of wafer cleaning equipment. The fixing device of the wafer cassette includes a support plate assembly, a pressure plate assembly and a top plate assembly; the support plate assembly is used to limit the position of the lower end of the wafer cassette; one end of the pressure plate assembly is connected to the support plate assembly, and the pressure plate assembly is used for the wafer The side position of the box is limited; the other end of the platen assembly is connected to the top plate assembly, and the top plate assembly can press the platen assembly, so that the platen assembly defines the position of the upper end of the wafer cassette. It solves the problem that the installation jig of the wafer box has a complex structure, and the wafer is not firmly fixed and easily damaged when the wafer is soaked and cleaned. In the present invention, the position of the lower end of the wafer cassette is limited by the support plate assembly, the side position of the wafer cassette is limited by the pressure plate assembly, and the upper end position of the wafer cassette by the pressure plate assembly is squeezed by the top plate assembly defined to ensure a firm connection position for the wafer cassette.

Description

technical field [0001] The invention relates to the technical field of wafer cleaning equipment, in particular to a fixing device for a wafer box. Background technique [0002] As the basic material for manufacturing semiconductor chips, wafers play an important role in the development of the semiconductor industry. Wafer refers to the silicon wafer used in the production of silicon semiconductor integrated circuits, which can be processed into various circuit element structures and become integrated circuit products with characteristic electrical functions. [0003] In the process of making wafers, it is necessary to clean the wafers. When cleaning, it is necessary to use wafer cassettes to fix the wafers, and then connect the wafer cassettes to the installation fixture. Most of the existing installation fixtures use metal The frame body is used to fix the wafer cassette. [0004] However, due to the many parts of the mounting fixture and the complex connection structure,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/687H01L21/67
CPCH01L21/67057H01L21/687
Inventor 陈苏伟李元升吴光庆吴娖黄鑫亮
Owner BEIJING SEMICON EQUIP INST THE 45TH RES INST OF CETC
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