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spit out system

An outflow, fluid technology, used in coatings, pump control, liquid fuel engines, etc., can solve problems such as coating quality effects, and achieve excellent responsiveness.

Active Publication Date: 2022-04-22
HEISHIN ENGINEERING & EQUIPMENT CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Especially in applications where the fluid discharged onto the workpiece needs to be evenly coated in a thin film, even a small change in the discharge rate due to extremely small pressure fluctuations may affect the coating quality

Method used

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Experimental program
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Embodiment Construction

[0075] Hereinafter, a discharge system 1 according to an embodiment of the present invention will be described in detail with reference to the drawings. In addition, in the following description, first, the configuration of the discharge system 1 will be described, and then the control performed in the discharge system 1 will be described in detail.

[0076] "The Composition of Dispensing System 1"

[0077] The discharge system 1 is used to discharge the fluid applied to the workpiece W. As shown in FIG. The discharge system 1 is suitable for applications in which a liquid must be applied in a thin film, such as applying a battery material to a workpiece W or applying a resin material for bonding a display. The discharge system 1 has a configuration described in detail below to suppress fluctuations in film thickness due to minute fluctuations in the fluid discharge amount.

[0078] like figure 1 and figure 2 As shown, the discharge system 1 includes a pump 10 , a nozzle ...

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Abstract

The object of the present invention is to provide a kind of discharge system that has a high effect of reducing the slight fluctuation of the discharge amount of the fluid and has excellent responsiveness; the discharge system (1) has: a pump (10) for conveying fluid, and (10) A nozzle (60) at a position closer to the downstream side in the conveying direction of the fluid and having a discharge port (62) for discharging the fluid is formed so as to extend from the first opening (14a) of the pump (10) to the nozzle ( The main channel (72) of the discharge port (62) of 60), the branch channel (74) formed in a way to branch from the main channel (72), is connected with the branch channel (74), and passes through the pressure receiving part ( 82b) A pressure accumulator (82) for accumulating and releasing pressure, and an on-off valve (84) provided in the branch channel (74) at a position closer to the main channel (72) than the pressure accumulator (82) , and a control device (90) for controlling the pump (10) and the switching valve (84).

Description

technical field [0001] The present invention relates to a spit system. Background technique [0002] As the performance of electronic equipment and the like has improved in recent years, there has been a demand for improvement in performance such as stability of material supply in devices for supplying materials in the manufacturing process thereof. In particular, in applications where the fluid discharged onto the workpiece needs to be uniformly coated in a thin film, even a slight fluctuation in the discharge amount due to an extremely small pressure fluctuation may affect the coating quality. Therefore, in order to improve the performance of electronic equipment and the like, also in a discharge system for discharging fluid, it is desired to further enhance the effect of reducing minute fluctuations in the discharge amount of fluid. [0003] Therefore, in order to satisfy the above expectations, it is necessary to apply a fluid in a thin film form to a workpiece in the m...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B05C5/02B05C11/10
CPCF04C2/16F04C14/24
Inventor 须原伸久石田俊浩宫崎康则权藤史昭
Owner HEISHIN ENGINEERING & EQUIPMENT CO LTD