Substrate detection device and detection method

Abstract

The invention discloses a substrate detection device and detection method. The substrate detection device comprises a first image collection unit, an illumination device and a controller; the first image collection unit is capable of collecting the images of a substrate to be tested from different angles; the illumination device illuminates the substrate to be tested when the first image collection unit collects the images of the substrate to be tested; and the controller synthesizes the images collected by the first image collection unit from different angles into a first panoramic image. According to the substrate detection device provided by the embodiments provided by the present invention, the display defect of the substrate to be tested can be accurately detected by means of the first panoramic image, the limitations of manual substrate detection and manual detection recording in the prior art can be eliminated, and the production yield of display products is effectively improved.

Description

technical field [0001] The invention relates to the field of display technology, in particular to a substrate detection device and detection method. Background technique [0002] The progress of modern display technology benefits from the development of production technology and various intelligent detection and monitoring technologies, especially in the mature TFT-LCD industry. Due to the complex manufacturing process of TFT substrates, multiple processes need to cooperate with each other, and multiple processes are continuously produced. Although there are corresponding manual and intelligent detection devices for each process, the intelligent detection device is mainly used for the detection of microscopic defects, which can be enlarged by the camera and taken to save evidence, which is convenient for later reference, but for macroscopic display defects ( Mura) need to rely on manual observation and manual recording, and the poor surface unevenness of the substrate, espec...

AI Technical Summary

Problems solved by technology

Although there are corresponding manual and intelligent detection devices for each process, the intelligent detection device is mainly used for the detection of microscopic defects, which can be enlarged by the camera and taken to save evidence, which is convenient for later reference, but for macroscopic display defects ( Mura) need to rely on manual observation and manual recording, and the poor surface unevenness of the substrate, especially the potential unevenness can only be observed by relying on different angles and different lighting, which has caused limitations in manual observation and detection, and Due to the diversity and complexity of the process, the unevenness of the substrate surface exists objectively and varies from batch to batch, which has different effects on the display quality of the final product at the back end.

This creates a problem. Due to the limitations of manual observation and recording, the uneven image quality at the back end cannot be matched with the surface unevenness of the substrates produced in the current batch, let alone the corresponding procedures, which creates difficulties for the effectiveness and accuracy of problem solving

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