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Piezoelectric-driven ultra-precise four-degree-of-freedom positioning and attitude adjustment mechanism and its excitation method

A piezoelectric drive, degree of freedom technology, applied in the direction of generators/motors, piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, etc., can solve complex structures and excitation methods, high prices, and limited applications range and other issues

Active Publication Date: 2020-03-06
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, more mature multi-degree-of-freedom piezoelectric drivers are generally realized by connecting multiple single-degree-of-freedom drivers in series or in parallel, which leads to complex structures and excitation methods.
In addition, most piezoelectric drivers use piezoelectric stacks as driving elements, and piezoelectric stacks have poor tensile strength and high prices, which also limit their application range

Method used

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  • Piezoelectric-driven ultra-precise four-degree-of-freedom positioning and attitude adjustment mechanism and its excitation method
  • Piezoelectric-driven ultra-precise four-degree-of-freedom positioning and attitude adjustment mechanism and its excitation method
  • Piezoelectric-driven ultra-precise four-degree-of-freedom positioning and attitude adjustment mechanism and its excitation method

Examples

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specific Embodiment 1

[0064] The following is attached with the manual figure 1 , figure 2 , image 3 , Figure 4 This embodiment will be further described in detail. This embodiment provides a figure 1 The shown ultra-precision four-degree-of-freedom positioning and attitude adjustment mechanism uses piezoelectric ceramic tubes as the main driving elements. The positioning and attitude adjustment mechanism includes a mover 1, an upper side driving foot 2, a piezoelectric ceramic tube 3, a fixed clamp block 4, a transverse guide rail 5, a longitudinal guide rail 6, a lower side driving foot 7 and a base 8; 8 stays fixed. figure 1 The axial direction of the piezoelectric ceramic tube 3 is the Z-axis direction, the horizontal direction perpendicular to the axial direction of the piezoelectric ceramic tube 3 is the Y-axis direction, and the depth direction orthogonal to the axial direction of the piezoelectric ceramic tube 3 is the X-axis The directions are represented by X-axis direction, Y-ax...

specific Embodiment 2

[0070] The following is attached with the manual figure 1 , figure 2 , image 3 , Figure 5 , Figure 6 , Figure 7 This embodiment will be further described in detail. This embodiment provides a figure 1 The excitation method of the ultra-precision four-degree-of-freedom positioning and attitude-adjusting mechanism is shown, which can realize the large-scale four-degree-of-freedom ultra-precision movement of the mover 1, including linear motion along the X-axis or Y-axis direction and around the X-axis or The rotational movement in the Y-axis direction can achieve nanoscale resolution by adjusting the amplitude and time of the excitation voltage signal. In this embodiment, the polarization direction of each partition of the piezoelectric ceramic tube 3 is as follows: figure 2 As shown, the way to apply the excitation voltage signal to the upper and lower parts of each partition electrode is as follows image 3 shown.

[0071] The excitation method for realizing the...

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Abstract

The invention is a piezoelectric driving ultra-precision four-degree-of-freedom positioning and attitude adjusting mechanism and an excitation method thereof. The technical problem that an existing piezoelectric positioning and attitude adjusting mechanism has a single structure, a large size and a high cost of a driving component is solved. The positioning and attitude adjusting mechanism is formed by a mover (1), an upper driving foot (2), a piezoelectric ceramic tube (3), a fixed clamp (4), a lateral guide rail (5), a longitudinal guide rail (6), a lower driving foot (7) and a base (8), wherein the piezoelectric ceramic tube (3) is a main driving element and is used for generating bending deformation to drive the two-degree-of-freedom linear motion and the two-degree-of-freedom rotational motion of the mover (1). Based on the excitation method in the present invention, the positioning and attitude adjusting mechanism can realize large-scale ultra-precision motion. The positioning and attitude adjusting mechanism in the invention has a simple and compact structure, the excitation method is simple and feasible, and the positioning and attitude adjusting mechanism and the excitation method are convenient to apply in the technical field requiring precise positioning and attitude adjustment of an operation object.

Description

technical field [0001] The invention relates to the technical field of piezoelectric drive, and relates to a piezoelectric-driven ultra-precision four-degree-of-freedom positioning and attitude adjustment mechanism and an excitation method thereof. Background technique [0002] In recent years, with the development and related demands of cell science, ultra-precision optics and micro-nano operation technology, piezoelectric drive technology, as a new type of drive technology, has been widely used in the fields of ultra-precision positioning and processing, and has received great attention. develop. Piezoelectric drive technology is a drive technology that uses the inverse piezoelectric effect of piezoelectric materials to obtain corresponding mechanical output through input electrical signals. Generally speaking, piezoelectric actuators have the advantages of simple structure, high resolution, high power density, good electromagnetic compatibility, and easy miniaturization,...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/00
Inventor 刘英想于洪鹏陈维山刘军考
Owner HARBIN INST OF TECH
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