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Piezoelectric driving ultra-precision four-degree-of-freedom positioning and attitude adjusting mechanism and excitation method thereof

A piezoelectric drive, ultra-precision technology, applied in the direction of generators/motors, piezoelectric effect/electrostrictive or magnetostrictive motors, electrical components, etc., can solve complex structures and excitation methods, high prices, piezoelectric Poor stacking tensile capacity and other issues

Active Publication Date: 2019-06-28
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, more mature multi-degree-of-freedom piezoelectric drivers are generally realized by connecting multiple single-degree-of-freedom drivers in series or in parallel, which leads to complex structures and excitation methods.
In addition, most piezoelectric drivers use piezoelectric stacks as driving elements, and piezoelectric stacks have poor tensile strength and high prices, which also limit their application range

Method used

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  • Piezoelectric driving ultra-precision four-degree-of-freedom positioning and attitude adjusting mechanism and excitation method thereof
  • Piezoelectric driving ultra-precision four-degree-of-freedom positioning and attitude adjusting mechanism and excitation method thereof
  • Piezoelectric driving ultra-precision four-degree-of-freedom positioning and attitude adjusting mechanism and excitation method thereof

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specific Embodiment 1

[0063] The following is attached with the instruction manual figure 1 , figure 2 , image 3 , Figure 4 This embodiment will be described in further detail. This embodiment provides a method such as figure 1 The ultra-precision four-degree-of-freedom positioning and attitude adjustment mechanism using piezoelectric ceramic tubes as the main driving element is shown. The positioning and posture adjustment mechanism includes a mover 1, an upper driving foot 2, a piezoelectric ceramic tube 3, a fixed clamp block 4, a transverse guide rail 5, a longitudinal guide rail 6, a lower driving foot 7 and a base 8; 8 Keep it fixed. figure 1 The axial direction of the medium piezoelectric ceramic tube 3 is the Z-axis direction, the horizontal direction orthogonal to the axial direction of the piezoelectric ceramic tube 3 is the Y-axis direction, and the depth direction orthogonal to the axial direction of the piezoelectric ceramic tube 3 is the X-axis The directions, in the following embod...

specific Embodiment 2

[0068] The following is attached with the instruction manual figure 1 , figure 2 , image 3 , Figure 5 , Image 6 , Figure 7 This embodiment will be described in further detail. This embodiment provides a method based on figure 1 The excitation method of the ultra-precision four-degree-of-freedom positioning and attitude adjustment mechanism shown in the figure can realize the large-scale four-degree-of-freedom ultra-precision movement of mover 1, including linear movement along the X-axis or Y-axis and around the X-axis or The rotational movement in the Y-axis direction can achieve nanometer resolution by adjusting the amplitude and time of the excitation voltage signal. In this embodiment, the polarization direction of each partition of the piezoelectric ceramic tube 3 is as follows: figure 2 As shown, the method of applying excitation voltage signal to each partition electrode of the upper and lower parts is as follows image 3 Shown.

[0069] The excitation method for re...

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Abstract

The invention is a piezoelectric driving ultra-precision four-degree-of-freedom positioning and attitude adjusting mechanism and an excitation method thereof. The technical problem that an existing piezoelectric positioning and attitude adjusting mechanism has a single structure, a large size and a high cost of a driving component is solved. The positioning and attitude adjusting mechanism is formed by a mover (1), an upper driving foot (2), a piezoelectric ceramic tube (3), a fixed clamp (4), a lateral guide rail (5), a longitudinal guide rail (6), a lower driving foot (7) and a base (8), wherein the piezoelectric ceramic tube (3) is a main driving element and is used for generating bending deformation to drive the two-degree-of-freedom linear motion and the two-degree-of-freedom rotational motion of the mover (1). Based on the excitation method in the present invention, the positioning and attitude adjusting mechanism can realize large-scale ultra-precision motion. The positioning and attitude adjusting mechanism in the invention has a simple and compact structure, the excitation method is simple and feasible, and the positioning and attitude adjusting mechanism and the excitation method are convenient to apply in the technical field requiring precise positioning and attitude adjustment of an operation object.

Description

Technical field [0001] The invention relates to the technical field of piezoelectric driving, and is a piezoelectrically driven ultra-precision four-degree-of-freedom positioning and attitude adjustment mechanism and an excitation method thereof. Background technique [0002] In recent years, with the development and related needs of cell science, ultra-precision optics and micro-nano operation technology, piezoelectric drive technology has been widely used in the fields of ultra-precision positioning and processing as a new type of drive technology, and has been greatly improved development of. Piezoelectric drive technology is a drive technology that uses the inverse piezoelectric effect of piezoelectric materials to obtain corresponding mechanical output by inputting electrical signals. Generally speaking, piezoelectric actuators have the advantages of simple structure, high resolution, high power density, good electromagnetic compatibility, and easy realization of miniaturiz...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/00
Inventor 刘英想于洪鹏陈维山刘军考
Owner HARBIN INST OF TECH
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