Piezoelectric ceramic stack synchronous bonding tool
A piezoelectric ceramic stacking technology, applied in the field of piezoelectric ceramic stack synchronous bonding tooling, can solve the problems of large height difference of piezoelectric ceramic stack components, and achieve thickness control, small feed resolution, and operation smooth effect
Active Publication Date: 2020-03-27
JIHUA LAB
View PDF8 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0004] The object of the present invention is to provide a piezoelectric ceramic stack synchronous bonding tool to solve the problem of thickness control of the bonding of piezoelectric ceramic stacks and / or different piezoelectric ceramic stacks and structures such as alumina ceramic plates The problem of the large height difference of the components after the parts are glued together
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0027] Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings, so as to better understand the purpose, features and advantages of the present invention. It should be understood that the embodiments shown in the drawings are not intended to limit the scope of the present invention, but only to illustrate the essence of the technical solutions of the present invention.
[0028] In the following description, for the purposes of explaining the various disclosed embodiments, certain specific details are set forth in order to provide a thorough understanding of the various disclosed embodiments. One skilled in the relevant art will recognize, however, that an embodiment may be practiced without one or more of these specific details. In other instances, well-known devices, structures and techniques associated with the present application may not have been shown or described in detail in order to avoid unnecessarily...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention discloses a piezoelectric ceramic stack synchronous bonding tool. The tool comprises a frame, a base, a standard block and a moving assembly, wherein the frame is provided with a guide rail in the vertical direction; the moving assembly is matched with the guide rail and moves up and down along the guide rail; the standard block is arranged on the base and is matched with the bottomof the moving assembly so as to limit the vertical direction of the moving assembly when the moving assembly moves downwards; a structural member is mounted at the bottom of the moving assembly, and the piezoelectric ceramic stack is arranged on the base and is aligned with the structural member; and when the moving assembly is driven to move downwards to enable the bottom of the moving assembly to be in contact with the standard block, the structural member is pressed on the piezoelectric ceramic stack, so that the piezoelectric ceramic stack and the structural member are bonded together. According to the tool, the problem of thickness control of bonding of the piezoelectric ceramic stack, and / or the problem of large height difference of the assembly after the different piezoelectric ceramic stacks and the structural members such as aluminum oxide ceramic plates are bonded together can be solved.
Description
technical field [0001] The invention relates to the field of integrated circuit equipment manufacturing, in particular to a piezoelectric ceramic stack synchronous bonding tool. Background technique [0002] In recent years, with the continuous improvement of the integration of large-scale integrated circuit devices, the demand for ultra-large-scale integrated circuits has continued to increase, and the demand for lithography machines for manufacturing ultra-large-scale integrated circuits has increased accordingly. The key component projection objective lens is very complicated. The requirements for its aberrations are very strict, and some of the lenses need to adjust their sub-nanometer degrees of freedom through piezoelectric ceramic motors to adjust high-order aberrations to meet the needs of lithography. At this stage, piezoelectric ceramic motors have various forms, such as ultrasonic motors, friction-driven motors, and inertia-driven motors. [0003] The core of the...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): H02N2/00
CPCH02N2/22
Inventor 杨晓峰郝凌凌康华洲王振华陈庆生
Owner JIHUA LAB