Mask assembly and detection method for splicing accuracy of mask assembly
A technology of mask plates and components, which is applied to the photoplate-making process of patterned surfaces, originals for photomechanical processing, optics, etc., can solve problems such as low splicing accuracy, dark lines on display panels, and abnormal exposure patterns, etc., and achieve effective Measuring and Monitoring Effects
Active Publication Date: 2019-07-26
YUNGU GUAN TECH CO LTD
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- Application Information
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Problems solved by technology
Low splicing accuracy will cause abnormal exposure graphics, resulting in problems such as dark lines and bright lines in the display process of the display panel
Method used
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[0041] The characteristics and exemplary embodiments of various aspects of the present invention will be described in detail below. In order to make the purpose, technical solutions and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described here are only configured to explain the present invention, not to limit the present invention. It will be apparent to one skilled in the art that the present invention may be practiced without some of these specific details. The following description of the embodiments is only to provide a better understanding of the present invention by showing examples of the present invention.
[0042] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation...
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Abstract
The invention discloses a mask assembly and a detection method for splicing accuracy of the mask assembly. The mask assembly comprises more than two masks, wherein more than two masks can be spliced to form a preset mask pattern, each mask comprises a substrate layer and a resistance layer, the substrate layer comprises a mask region and a non-mask region, the non-mask region encircles a peripheral side of the mask region, the mask region comprises mask pattern units for being spliced to form the mask pattern, the non-mask region comprises a splicing region for splicing, the resistance layer is arranged at the splicing region and extends by preset width in parallel to a first direction of a splicing interface, the resistance layer of two adjacent masks are abutted to form a to-be-measuredresistor, and the resistance of the to-be-resistor is in reversely proportional to the size of the abutting contact area. With the mask assembly and the detection method for splicing accuracy of the mask assembly, provided by the invention, the splicing assembly of the mask assembly can be intuitively and effectively monitored.
Description
technical field [0001] The invention relates to the field of display technology, in particular to a mask assembly and a detection method for splicing accuracy of the mask assembly. Background technique [0002] In the development of display panels, especially in the process of developing medium and large-sized display panels (such as vehicle display panels, etc.), when preparing array substrates, due to the limited conditions such as exposure machine equipment and small mask size, it is often Mask splicing exposure is required. Low splicing accuracy will cause abnormal exposure graphics, resulting in problems such as dark lines and bright lines in the display process of the display panel. [0003] How to intuitively and effectively measure and monitor the splicing accuracy of mask plates has become a technical problem to be solved urgently. Contents of the invention [0004] Embodiments of the present invention provide a mask assembly and a detection method for the splic...
Claims
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CPCG03F1/44
Inventor 杨华东张鹏记林超王建禹
Owner YUNGU GUAN TECH CO LTD