Detection method of mask plate assembly and splicing accuracy of mask plate assembly
A mask and component technology, which is applied to the photoengraving process of the pattern surface, the originals and instruments for opto-mechanical processing, etc., can solve the problems of low splicing accuracy, dark lines on the display panel, abnormal exposure patterns, etc. Measuring and monitoring effectiveness
Active Publication Date: 2022-06-28
YUNGU GUAN TECH CO LTD
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Problems solved by technology
Low splicing accuracy will cause abnormal exposure graphics, resulting in problems such as dark lines and bright lines in the display process of the display panel
Method used
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[0041] The features and exemplary embodiments of various aspects of the present invention will be described in detail below. In order to make the objectives, technical solutions and advantages of the present invention more clear, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only configured to explain the present invention, and are not configured to limit the present invention. It will be apparent to those skilled in the art that the present invention may be practiced without some of these specific details. The following description of the embodiments is only intended to provide a better understanding of the present invention by illustrating examples of the invention.
[0042] It should be noted that, in this document, relational terms such as first and second are used only to distinguish one entity or operation from...
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Abstract
The invention discloses a mask assembly and a detection method for the splicing accuracy of the mask assembly. The mask assembly includes more than two mask sheets, and the two or more mask sheets can be spliced together to form a preset mask. pattern, the mask plate includes: a base layer, including a mask area and a non-masking area surrounding the mask area, the mask area includes a mask pattern unit for splicing to form a mask pattern, and the non-masking area includes A splicing area for splicing; and a resistance layer, arranged in the splicing area and extending a predetermined width along a first direction parallel to the splicing interface; wherein, the resistance layers of two adjacent mask plates are butted to form a resistance to be measured, and the resistance to be measured The resistance value is inversely proportional to the size of the butt contact area. The mask plate assembly and the detection method of the splicing accuracy of the mask plate assembly provided by the present invention can intuitively and effectively monitor the splicing accuracy of the mask plate assembly.
Description
technical field [0001] The invention relates to the field of display technology, in particular to a mask assembly and a method for detecting the splicing accuracy of the mask assembly. Background technique [0002] In the development of display panels, especially in the process of developing medium and large size display panels (such as vehicle-mounted display panels, etc.), during the preparation of array substrates, due to limited conditions such as exposure machine equipment and small mask size, it is often Mask splicing exposure is required. Low stitching accuracy will cause abnormal exposure graphics, resulting in dark lines and bright lines in the display panel during the display process. [0003] How to measure and monitor the mask splicing accuracy intuitively and effectively has become an urgent technical problem to be solved. SUMMARY OF THE INVENTION [0004] Embodiments of the present invention provide a mask assembly and a method for detecting the splicing ac...
Claims
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IPC IPC(8): G03F1/44
CPCG03F1/44
Inventor 杨华东张鹏记林超王建禹
Owner YUNGU GUAN TECH CO LTD