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Vacuum drying device

A technology of a vacuum drying device and a vacuum chamber, which is applied to devices for coating liquid on surfaces, pretreatment surfaces, coatings, etc., can solve problems such as uneven brightness of display panels, and achieve the effect of improving display uniformity.

Pending Publication Date: 2019-08-27
KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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Problems solved by technology

[0002] In the field of display panel manufacturing, the substrate coated with photoresist is generally placed in a vacuum drying device in the yellow light process, so that the organic solvent in the photoresist on the surface of the substrate is volatilized to dry the photoresist, but this drying method is easy to cause Display panel brightness is uneven

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Embodiment Construction

[0026] The present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention. In addition, it should be noted that, for the convenience of description, only some structures related to the present invention are shown in the drawings but not all structures.

[0027] As mentioned in the background technology, the vacuum drying process is likely to cause uneven brightness of the display panel. The inventor found through research that, during vacuum drying, the gas in the vacuum chamber in the vacuum drying device must first be pumped out to make the vacuum chamber reach the minimum air pressure. . During the process of reducing the air pressure in the vacuum chamber to atmospheric pressure, various traces will be left on the surface of the substrate to be dried due to th...

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Abstract

The embodiment of the invention discloses a vacuum drying device. The vacuum drying device comprises a vacuum cavity; the vacuum cavity comprises a cover plate and a base plate carrying table which are oppositely arranged; the cover plate comprises a central area and an edge area surrounding the central area; and gas inlet holes are formed in the central area and the edge area correspondingly. According to the scheme of the device, gas is prevented from forming a vortex from the periphery of a to-be-dried base plate to the center of the to-be-dried base plate in the gas inlet process, and therefore, the phenomenon that various marks are left on the surface of the to-be-dried base plate is avoided, and the display uniformity of a display panel is improved.

Description

technical field [0001] The embodiments of the present invention relate to vacuum drying technology, in particular to a vacuum drying device. Background technique [0002] In the field of display panel manufacturing, the substrate coated with photoresist is generally placed in a vacuum drying device in the yellow light process, so that the organic solvent in the photoresist on the surface of the substrate is volatilized to dry the photoresist, but this drying method is easy to cause Display panel brightness is uneven. Contents of the invention [0003] The present invention provides a vacuum drying device to prevent gas from forming a vortex from the periphery of the substrate to be dried to the center of the substrate to be dried during air intake, thereby avoiding leaving various traces on the surface of the substrate to be dried and improving the display uniformity of the display panel. [0004] In a first aspect, an embodiment of the present invention provides a vacuum...

Claims

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Application Information

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IPC IPC(8): B05D3/04
CPCB05D3/0493
Inventor 刘灵蒋际君汪永佳沈楠
Owner KUNSHAN GO VISIONOX OPTO ELECTRONICS CO LTD
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