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Bubbling device and measuring method for measuring Young modulus of two-dimensional material

A technology of two-dimensional materials and bubbling devices, applied in the field of mechanical measurement, can solve the problems of low measurement accuracy and complex influence on measurement results, achieve high measurement accuracy, compensate for long loading cycles, and avoid stress concentration problems

Active Publication Date: 2019-09-10
THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Although the author proposes to introduce a pre-tension method to eliminate surface wrinkles of the sample, it is expected that the influence of boundary conditions on the measurement results will be more complicated
In addition, since the applied pressure range is a key experimental parameter for studying two-dimensional material samples with different thicknesses, but limited by the PDMS-O ring used t

Method used

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  • Bubbling device and measuring method for measuring Young modulus of two-dimensional material
  • Bubbling device and measuring method for measuring Young modulus of two-dimensional material

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Embodiment 1

[0115] This example is a bubbling experiment of graphene. The graphite sheet used is: natural graphite (Taizhou Juna New Energy Co., Ltd.), with a purity of >99%, and a size of about 2mm; silicon wafer: N100 (Hangzhou Jingbo Technology Co., Ltd.), resistivity It is 0.01~0.02Ω·cm, and the surface is covered with 300nm silicon dioxide coating.

[0116] Part of the specific embodiments of the present invention provides a bubbling technique for measuring the Young's modulus of a two-dimensional material, said technique comprising the following steps:

[0117] (1) Micromachining a through-hole with a certain diameter in the center of a silicon wafer with a side length of 1 cm: First, rough machining is performed from the back of the silicon wafer by chemical etching to form a square or circular truncated truss, and the central area of ​​the silicon wafer is thinned; Engraving and plasma etching techniques process round holes on the front side, penetrating the silicon wafer. The di...

Embodiment 2

[0127] The present embodiment provides a kind of bubbling technique of measuring the Young's modulus of two-dimensional material, described technology except that two-dimensional material is the bilayer graphene sample of mechanical exfoliation, other steps are all the same as in embodiment 1, and step ( 7) There are also in situ Raman experiments supplemented as follows.

[0128] Connect the relevant components everywhere, close all valve switches, and form a closed space in the pressure chamber. Fix the bubbling device on the AFM stage. Open the valve of the pressure system and blow nitrogen gas into the pressure chamber. Bubbles will form at the center hole of the through-hole silicon wafer due to the pressure difference between the inside and outside of the graphene film. Each pressure is maintained for 5 minutes, and then the double-layer graphene is characterized by a Raman spectrometer. The Raman spectrum of the center point of the bubble, as Figure 9 As shown, the p...

Embodiment 3

[0130] The present embodiment provides a kind of bubbling technique of measuring Young's modulus of two-dimensional material, described technology is CVD monolayer graphene sample except two-dimensional material, and the diameter of circular hole is 3 μm in step (2), and step (3 ) adopts wet transfer, except that the Raman spectrum laser wavelength is 633nm in step (4), other steps are all the same as in Example 1.

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Abstract

The invention provides a bubbling device and a measuring method for measuring Young modulus of a two-dimensional material, and the bubbling device comprises a pressurizing system and a pressure chamber connected in sequence, wherein the top of the pressure chamber is provided with an upper air port; a bearing substrate for carrying the two-dimensional material to be tested is fixed at the upper air port; and a through hole is defined at a position corresponding to the upper air port of the bearing substrate. The bubbling device provided by the invention implements a wide range of pressure regulation, controllable deformation and continuous strain loading on a two-dimensional material through the bubbling device designed and processed by itself, the in-situ characterization of the bubblingmorphology is carried out with an atomic force microscopy, and a Young modulus value of corresponding material is calculated based on the thin film theory.

Description

technical field [0001] The invention belongs to the field of mechanical measurement, and relates to a bubbling device and a measuring method for measuring the mechanical properties of two-dimensional materials, in particular to a bubbling device and a measuring method for measuring the Young's modulus of two-dimensional materials. Background technique [0002] Due to its novel and unique properties in physics, chemistry, and mechanics, graphene has set off a research boom in two-dimensional crystal materials (graphene, boron nitride, black phosphorus, and transition metal sulfides, etc.). When the thickness of these crystal materials is reduced to the atomic level, the quantum confinement effect in the two-dimensional scale makes them exhibit physical properties that are completely different from those of the macroscopic bulk. Potential application prospects. In practical applications, the intrinsic mechanical properties and interfacial mechanics of two-dimensional material...

Claims

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Application Information

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IPC IPC(8): G01N3/08G01N3/02
CPCG01N3/08G01N3/02G01N2203/0044G01N2203/0098G01N2203/0282G01N2203/0641G01N2203/0298
Inventor 李远瞳汪国睿刘璐琪张忠
Owner THE NAT CENT FOR NANOSCI & TECH NCNST OF CHINA
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