Morphological information detection system, method and device
A technology for information detection and topography, applied in measurement devices, instruments, scanning probe microscopy, etc., can solve the problems of low accuracy and efficiency of surface topography information, and achieve the effect of improving accuracy
Pending Publication Date: 2019-12-13
GLOBAL ENERGY INTERCONNECTION RES INST CO LTD
View PDF0 Cites 2 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0004] Therefore, the technical problem to be solved by the present invention is to overcome the defects of low accuracy and low efficiency in obtaining the surface topography information of the tested sample in related technologies, thereby providing a topography information detection system, method and device
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0027] The technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0028] In addition, the terms "first", "second", and "third" are used for descriptive purposes only, and should not be construed as indicating or implying relative importance.
[0029] In the description of the present invention, it should be noted that unless otherwise specified and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense, for example, it can be a fixed connection or a detachable connection. Connected, or integrally connected; it can be mechanical...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention discloses a morphology information detection system, method and device, and the system comprises a detected sample carrier which is used for placing a detected sample; a morphology information detection device which comprises a micro force sensitive element and is used for detecting morphology information of the detected sample; a static electricity eliminating device which is used for eliminating static electricity between the micro force sensitive element and the tested sample; and a controller which is connected with the morphology information detection device and the static electricity removal device, is connected with the morphology information detection device and the static electricity removal device, and is used for controlling the static electricity removal device and the morphology information detection device to respectively carry out static electricity removal and morphology information detection operations. By arranging the static electricity eliminating device, static electricity between the morphology detection device and the detected sample is eliminated, the influence of the static electricity between the morphology information detection device and the detected sample on a morphology detection result is avoided, and the accuracy of the morphology detection result and the morphology detection efficiency are improved.
Description
technical field [0001] The invention relates to the field of equipment detection, in particular to a system, method and device for detecting shape information. Background technique [0002] In the actual product manufacturing and production process, the surface morphology of the sample is usually tested to produce products that meet the requirements. In related technologies, the sample surface topography detection instrument determines the surface topography characteristics of the tested sample based on the principle of detecting the extremely weak interatomic interaction force between the tested sample surface and a miniature force sensitive element. For example, the widely used atomic force microscope (Atomic Force Microscope, AFM) is a device that uses a micro-cantilever to sense and amplify the force between the probe on the cantilever and the atoms of the sample under test, so as to detect the surface morphology of the sample. That is to say, when the distance between ...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More IPC IPC(8): G01Q60/38
CPCG01Q60/38
Inventor 李玲李嘉琳吴昊刘瑞田亮李永平赛朝阳潘艳
Owner GLOBAL ENERGY INTERCONNECTION RES INST CO LTD