Insert structure and cassette for loading substrate with the same
A technology of inserts and substrates, applied in the direction of electrical components, semiconductor/solid-state device manufacturing, optics, etc., can solve problems such as cutting or damage, and achieve the effect of preventing damage and strengthening strength
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[0038] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art to which the present invention pertains can easily implement. The present invention can be embodied in various forms, and is not limited to the embodiments described here. In the drawings, parts irrelevant to the description are omitted in order to clarify the present invention, and the same or similar components are given the same symbols throughout the specification.
[0039] Hereinafter, the insert structure according to the embodiment of the present invention will be described in more detail with reference to the accompanying drawings. figure 1 is a perspective view showing a substrate loading cassette provided with an insert structure according to an embodiment of the present invention, figure 2 is showing figure 1 A perspective view of the state in which the middle bracket and the support rod are combined.
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