Vibration reducing mechanism of linear motor

Abstract

The invention discloses a vibration reducing mechanism of a linear motor. The output ends of a Y-direction linear motor and a Y-Z-direction linear motor synchronously and reversely move in the Y direction, a balancing weight is arranged at the lower end of the Y-direction linear motor, a floating system is arranged at the upper end of a motor connecting plate, and a vibration reducing structure isarranged on the outer side of the floating system. The output ends of the Y-direction linear motor and the Y-Z-direction linear motor synchronously and reversely move in the Y direction, the vibration of the Y-direction linear motor and the Y-Z-direction linear motor in the Y direction is reduced, the weight difference between the Y-direction linear motor and the Y-Z-direction linear motor is counteracted by arranging the balancing weight, the balancing weight cannot accurately eliminate the weight difference of the two motors and tiny vibration exists, and the vibration reducing structure onthe outer side of the floating system eliminates the tiny vibration brought by the balancing weight. The vibration reducing effect in the Y direction is achieved through the combined action of the Y-direction linear motor, the balancing weight and the vibration reducing structure, and the chip picking and pasting positions of the Y-Z-direction linear motor are accurate.

Description

technical field [0001] The invention relates to the technical field of linear motors, in particular to a vibration damping mechanism of a linear motor. Background technique [0002] Linear motor is a transmission device that directly converts electrical energy into linear motion mechanical energy without any intermediate conversion mechanism. The transmission device has the characteristics of simple structure, high positioning accuracy, fast response, safety and reliability, long life, etc., and is an indispensable mechanism in the subsequent packaging of chips. The mechanism mainly picks up the divided chips on the wafer through the combined movement of the horizontal direction (Y) and the vertical direction (Z), and combines them with the glued lead frame on the transport track. [0003] The traditional structure is a single set of linear motor Y-Z combined motion to pick up and paste the chips on the wafer, or multiple sets of linear motor Y-Z combined motion to pick up ...

AI Technical Summary

Problems solved by technology

Due to the high production capacity requirements of packaging equipment, linear motors mostly move at high speeds, and will have a large moment of inertia during the acceleration start and deceleration stop stages, resulting in overall vibration of the equipment, which will affect the position of picking up chips and pasting chips precision

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