Electronic device and process of forming the same
A technology of electronic devices and terminals, which is applied in the field of electronic devices and their formation, and can solve the problem of difficulty in controlling the shape of the field stop region
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Embodiment approach 1
[0061] Embodiment 1. An electronic device which may comprise:
[0062] A semiconductor substrate having a first main side, a second main side opposite the first main side, and a second main surface along the second main side;
[0063] an emitter region closer to the first main side than to the second main side, wherein the emitter region has a first conductivity type;
[0064] a trench extending from the second main surface into the semiconductor substrate, wherein the trench has sidewalls and a bottom;
[0065] a collector region spaced along the second major surface and from the bottom of the trench, wherein the collector region has a second conductivity type opposite the first conductivity type;
[0066] a field stop region disposed along at least a portion of the bottom and sidewalls of the trench, wherein the field stop region has the first conductivity type; and
[0067] A collector terminal along the second major side and comprising a metal-containing material, wherei...
Embodiment approach 2
[0068] Embodiment 2. The electronic device of Embodiment 1, further comprising an insulating layer disposed along sidewalls and a bottom of the trench, wherein the insulating layer is disposed between the field stop region and the collector terminal.
Embodiment approach 3
[0069] Embodiment 3. The electronic device of Embodiment 2, wherein the insulating layer substantially fills the trench.
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