Optical sensor and method for forming same
An optical sensor, circular technology, applied in the field of optical sensors, can solve the problems of collapse and deformation of light-transmitting columns, affecting the collimation effect of optical collimators, affecting the yield of optical sensors, etc., so as to avoid deformation and collapse, maintain The effect of uniformity and improved yield
Active Publication Date: 2022-03-25
VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION
View PDF6 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
However, in the process of making the optical collimator, the light-transmitting columns located at the edge of the light-transmitting column array are prone to collapse and deformation due to their own cohesion or the stress of the light-shielding layer, which affects the collimation effect of the optical collimator and further affects the finished product of the optical sensor Rate
[0004] Although the existing optical sensors generally meet the needs, they are not satisfactory in all aspects. In particular, the structural strength of the optical collimator to improve the optical sensor still needs to be further improved
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0041] Many different implementation methods or examples are disclosed below to implement different features of the embodiments of the present invention, and specific elements and embodiments of their arrangement are described below to illustrate the embodiments of the present invention. Of course, these embodiments are only for illustration, and should not limit the scope of the embodiments of the present invention. For example, it is mentioned in the description that the first feature is formed on the second feature, which includes the embodiment that the first feature is in direct contact with the second feature, and also includes other features between the first feature and the second feature. Embodiments of the features, that is, the first feature is not in direct contact with the second feature. In addition, repeated symbols or signs may be used in different embodiments, and these repetitions are only for the purpose of simply and clearly describing the embodiments of th...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
| Property | Measurement | Unit |
|---|---|---|
| transmittivity | aaaaa | aaaaa |
Login to View More
Abstract
An embodiment of the present invention provides an optical sensor and a forming method thereof, including: a plurality of pixels located in a substrate and a light collimating layer located on the substrate. The light collimating layer includes: a light shielding layer, a light-transmitting column, and a first dummy light-transmitting column. The light shielding layer is located on the substrate. The light-transmitting columns pass through the light-shielding layer and are correspondingly arranged on the pixels. The first dummy light-transmitting column passes through the light-shielding layer and is located in the first peripheral area of the light-collimating layer. The first virtual light-transmitting column surrounds the light-transmitting column in a plan view. According to the process and design requirements of the present invention, the array structure of the light-transmitting columns can be strengthened, the deformation and collapse of the light-transmitting columns at the edge of the array can be avoided, the uniformity of the light-transmitting columns can be maintained, and the yield rate can be improved.
Description
technical field [0001] The invention relates to an optical element, in particular to an optical sensor. Background technique [0002] Optical elements in an optical sensor may include a light collimator, a beam splitter, a focusing mirror, and a linear sensor. Wherein, the function of the optical collimator is to collimate light to reduce energy loss caused by light divergence. For example, the optical collimator can be applied in the optical sensor to increase the performance of the fingerprint identification device. [0003] The light collimator includes a light-transmitting column and a light-shielding layer surrounding the light-transmitting column to achieve the effect of collimating light. However, in the process of making the optical collimator, the light-transmitting columns located at the edge of the light-transmitting column array are prone to collapse and deformation due to their own cohesion or the stress of the light-shielding layer, which affects the collimat...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): H01L27/146
CPCH01L27/14625H01L27/14685
Inventor 李新辉曾汉良余俊良林光明陈茵陈子端林学荣吕文志吕定蓉
Owner VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION