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Bulk acoustic wave resonator with acoustic impedance mismatch structure, filter and electronic equipment

A bulk acoustic wave resonator, impedance mismatch technology, applied in the direction of impedance network, electrical components, etc., can solve the problem of high acoustic wave energy loss

Pending Publication Date: 2020-04-17
TIANJIN UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0025] Aiming at the above-mentioned shortcomings of traditional air-gap resonators, the present invention proposes to construct an acoustic wave reflection structure on the piezoelectric layer, so as to overcome the problem of excessive acoustic wave energy loss caused by the lack of acoustic mismatch regions in the traditional structure, thereby improving the The quality factor Q of the resonator

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  • Bulk acoustic wave resonator with acoustic impedance mismatch structure, filter and electronic equipment
  • Bulk acoustic wave resonator with acoustic impedance mismatch structure, filter and electronic equipment
  • Bulk acoustic wave resonator with acoustic impedance mismatch structure, filter and electronic equipment

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Embodiment Construction

[0088] The technical solutions of the present invention will be further specifically described below through the embodiments and in conjunction with the accompanying drawings. The following description of the embodiments of the present invention with reference to the accompanying drawings is intended to explain the general inventive concept of the present invention, but should not be construed as a limitation of the present invention.

[0089] A bulk acoustic wave resonator according to the present invention will be described below with reference to the drawings. It should be pointed out that, in the embodiments of the present invention, although the thin film bulk acoustic resonator is used as an example for illustration, these descriptions can be applied to other types of bulk acoustic wave resonators.

[0090] Refer below figure 1 The invention is generally described. figure 1 It is a schematic top view of the bulk acoustic wave resonator according to the present invent...

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Abstract

The invention relates to a bulk acoustic wave resonator. The bulk acoustic wave resonator comprises a substrate, an acoustic mirror, a bottom electrode disposed over the substrate, a top electrode, apiezoelectric layers arranged above the bottom electrode and between the bottom electrode and the top electrode, and an electrode support portion forming a gap at least between the piezoelectric layerand the top electrode. An overlapping region of the acoustic mirror, the bottom electrode, the piezoelectric layer, and the top electrode in the thickness direction of the resonator constitutes an effective region of the resonator. Along at least a portion of a free edge of the top electrode, the resonator is provided with an acoustic impedance mismatch structure. The invention further relates toa filter and electronic equipment with the filter.

Description

technical field [0001] Embodiments of the present invention relate to the field of semiconductors, and in particular to a bulk acoustic wave resonator, a filter with the resonator, and an electronic device with the filter. Background technique [0002] Bulk acoustic wave filters have the advantages of low insertion loss, high square factor, and high power capacity. Therefore, they are widely used in contemporary wireless communication systems and are important components that determine the quality of radio frequency signals entering and leaving the communication system. The performance of a bulk acoustic wave filter is determined by the bulk acoustic wave resonator that constitutes it. For example, the resonant frequency of the bulk acoustic wave resonator determines the operating frequency of the filter, the effective electromechanical coupling coefficient determines the bandwidth of the filter, and the quality factor determines the filter insertion. loss. When the filter ...

Claims

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Application Information

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IPC IPC(8): H03H9/17H03H9/54
CPCH03H9/175H03H9/173H03H9/54
Inventor 张孟伦庞慰杨清瑞
Owner TIANJIN UNIV
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