Capacitive pressure sensor and method of making the same

A pressure sensor and capacitive technology, applied in the field of sensors, can solve the problems of unfavorable use and low measurement accuracy of pressure sensors, and achieve the effect of sensitive measurement results

Active Publication Date: 2021-12-21
JABIL CIRCUIT SINGAPOREPTE
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the measurement accuracy of the pressure sensor in the prior art is low, which is not conducive to the use of

Method used

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  • Capacitive pressure sensor and method of making the same
  • Capacitive pressure sensor and method of making the same
  • Capacitive pressure sensor and method of making the same

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Embodiment Construction

[0046] In order to make the purpose, technical solution and advantages of the present application clearer, the technical solution of the present application will be clearly and completely described below in conjunction with specific embodiments of the present application and corresponding drawings. Apparently, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in this application, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the scope of protection of this application.

[0047] figure 1 A capacitive pressure sensor 1 according to an embodiment of the application is schematically shown. Such as figure 1 As shown, the capacitive pressure sensor 1 includes a first capacitive plate 100 and a second capacitive plate 200 stacked at intervals, and a dielectric layer 300 between the first capacitive plate 100 and the second...

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Abstract

The application discloses a capacitive pressure sensor and a manufacturing method thereof. The capacitive pressure sensor includes: a first capacitive plate and a second capacitive plate stacked at intervals, a dielectric layer between the first capacitive plate and the second capacitive plate, and the dielectric layer includes There is an air layer, and at least one of the first capacitor plate and the second capacitor plate is configured with a vent hole communicating with the air layer, and the first capacitor plate and the second capacitor plate are opposite to each other. During movement, air enters the air layer through the ventilation hole or is discharged from the air layer.

Description

technical field [0001] The present application relates to the field of sensors, in particular to a capacitive pressure sensor. The present application also relates to a method of manufacturing such a capacitive pressure sensor. Background technique [0002] With the rapid development of technology, portable electronic devices, such as smart phones, smart bracelets, tablet computers, etc., are gradually becoming popular. At present, more and more manufacturers place pressure sensors in portable electronic devices, so that the portable electronic devices have more functions, thereby improving user experience. However, the measurement accuracy of the pressure sensor in the prior art is low, which is unfavorable for use. Contents of the invention [0003] The first aspect of the present invention proposes a capacitive pressure sensor, including: a first capacitive plate and a second capacitive plate stacked at intervals, and a capacitive plate between the first capacitive pl...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/14G01L9/12
CPCG01L1/142G01L9/12
Inventor 何吉能陈晓慈郑勋钊陈彦州
Owner JABIL CIRCUIT SINGAPOREPTE
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