A method for automatic leveling of large-aperture planar optical components

Abstract

The invention discloses an automatic leveling method for a large-diameter planar optical element, which adopts an automatic leveling device, including a sample adjustment platform, a three-dimensional displacement platform, three laser displacement sensors, a data acquisition unit, a data analysis and processing unit and a control unit. Before automatic leveling, the initial relative distance calibration is performed on the three laser displacement sensors; during automatic leveling, the three laser displacement sensors simultaneously provide the relative distances of the three corresponding sampling points on the planar optical element, which are fed back to the controller after analysis and processing unit for pitch and roll angle leveling. During the leveling process, the relative distance of the three sampling points is fed back in real time, and the movement amount of the sample adjustment platform is corrected to realize closed-loop control. The invention has simple operation steps, does not need to scan the large-caliber planar optical element, greatly improves the leveling speed, and realizes non-contact, fast and automatic leveling of the large-caliber planar optical element.

Description

technical field [0001] The invention belongs to the field of optical technology, and in particular relates to an automatic leveling method for a large-caliber plane optical element. Background technique [0002] In the context of the demand for large-scale optical devices such as space telescopes and laser drives, the processing of optical components is also developing in the direction of large-aperture and high-precision. As one of the most commonly used optical components in optical devices, planar optical components, such as mirrors and optical windows, play an irreplaceable and important role. The diameter of planar optical components is getting bigger and bigger, and the requirements for surface precision are getting higher and higher, which also poses a more severe test to the detection technology of large-caliber planar optical components. At present, the microscopic imaging system is mainly used to scan and image the surface of the inspected sample, so as to obtain ...

AI Technical Summary

Problems solved by technology

This method requires the use of a microscope to sample three feature points on the surface. When the processing quality of the optical element to be inspected is good, the distribution of feature points is less, and it is often difficult to find suitable feature points; in addition, it is necessary to move the microscope to the three feature points , increasing the time required to level the

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