The invention relates to the technical field of micro-channel plates, and provides a method for rapidly forming and
processing a hexagonal channel micropore array optical element based on
laser point-by-point
punching induced
etching. The method comprises the following steps of:
polishing transparent glass serving as a substrate, and
processing through a photoetching process to form a hollow
hexagonal array pattern on the surface of the glass substrate; then a
galvanometer system is used for controlling a
laser beam to punch holes point by point at an S-shaped high speed according to a certain point interval, then wet
etching treatment is carried out, a
laser modification area is removed, and finally
photoresist at the position of the hollow hexagonal pattern is removed, so that the hexagonal channel micropore array is obtained. According to the method, a laser point-by-point
punching induced
etching rapid prototyping mode assisted by a photoetching
mask pattern is adopted, the
laser processing precision is converted into the precision of the
mask pattern, and the hexagonal channel micropore array with the ultrahigh array precision of + / -0.01 microns is efficiently manufactured; the problems of leakage holes,
dislocation, multifilament vertex angle
distortion and multifilament boundary deformation existing in the traditional process of directly
processing a hexagonal channel array by laser are solved.