A soft x-ray light source

Abstract

The application discloses a soft X-ray light source, comprising a vacuum target chamber, a refrigeration chamber and a nozzle, the refrigeration chamber and the nozzle are accommodated in the vacuum target chamber, the nozzle is arranged on the refrigeration chamber, and the vacuum target chamber includes a tee tube and a multi-pass tube , the three-way pipe has a first outlet, a second outlet and a third outlet opposite, the first outlet is connected with the support plate, the refrigerant inlet pipe, the refrigerant outlet pipe and the working gas pipe respectively pass through the support plate and are connected with the refrigeration cavity , the third outlet is connected with the vacuum pumping device; the multi-pass pipe includes a top opening and a bottom opening, the top opening is closely connected with the second outlet, a vacuum outlet is arranged at the bottom opening, the position of the nozzle corresponds to the side opening, and a nozzle is provided below the nozzle. The groove is fixed by an adapter, the adapter is arranged at the vacuum outlet, and the groove is communicated with the vacuum outlet. The present application can make the refrigeration cavity maintain high refrigeration performance, maintain the stability of micro-liquid flow, and improve the performance of soft X-rays.

Description

technical field [0001] The present application relates to the field of soft X-rays, and more particularly to a soft X-ray light source. Background technique [0002] X-ray is a kind of electromagnetic radiation with a very short wavelength, its wavelength is about 0.01 to 100 angstroms, which is between ultraviolet and gamma rays. It has high penetrating ability and can pass through many materials that are opaque to visible light. X-rays with shorter wavelengths have higher energy, also known as hard X-rays, and X-rays with longer wavelengths have lower energy and are called soft X-rays. Generally, superhard X-rays with wavelengths less than 0.1 angstroms are called hard X-rays, those with wavelengths in the range of 0.1-10 angstroms are called hard X-rays, and those with wavelengths in the range of 10-100 angstroms are called soft X-rays. [0003] In recent years, soft X-rays have been widely used in many scientific fields, especially in the fields of soft X-ray microscopy...

AI Technical Summary

Problems solved by technology

In the prior art, gas liquefaction is mainly realized by contacting a semiconductor refrigeration device with a pipeline with a working gas. This refrigeration device has two disadvantages: first, for some working gases with a lower liquefaction point (for example, nitrogen, often liquefaction point -196°C), the cooling capacity of the semiconductor refrigeration device cannot reach the level of liquefaction, even under high pressure; second, the efficiency of the refrigeration device is not high, using a spiral ventilation pipe and The semiconductor refrigerating plates are in contact with each other through metal heat conduction plates, and the heat transfer efficiency is not high, which makes it difficult to keep the temperature at the ventilation pipe consistent with the temperature of the refrigerating plates

[0006] In addition, all the liquid microfluidic target devices with fixed structure and non-adjustable structure are used in the prior art, and the position of the nozzle is fixed and non-adjustable after the installation is completed. Many soft X-ray applications, such as soft X-ray microscopes, require The light source has a high degree of geometric symmetry. If there is an error in the processing of the light source device or the position of the nozzle is deviated due to the aging of the instrument, it will directly affect the application of the instrument and reduce the application performance.

[0007] In short, there are liquid microfluidic target laser plasma soft X-ray light sources in the prior art, which have insufficient cooling performance of the liquid microfluidic target, poor stability of the liquid flow, size, spatial stability and brightness of the laser plasma, etc. Poor performance and other problems, it is difficult to meet the application requirements

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